摘要：【中文】本发明公开了一种用于制作碱金属蜡封包的模具、及制备和使用方法，所述模具包括硅基底；硅基底包括：位于硅基底边缘位置的半结构隔离体；以及硅基底中央部；硅基底中央部上表面内陷形成有若干蜡封包承载腔；相邻蜡封包承载腔之间形成承载腔隔离体；硅基底上表面形成有释放牺牲层，释放牺牲层的远离硅基底的上表面形成有石蜡层；石蜡层的远离释放牺牲层的一侧形成有用于承载碱金属的腔体；半结构隔离体上包括有腐蚀释放孔。本发明能够可靠、可控地实现均匀一致碱金属蜡封包阵列的批量化制作，完全兼容MEMS及微电子工艺，工艺流程简单易实施，可操作性强；并且蜡封包模具可重复使用，利于避免原材料浪费，可有效降低批量化制作的成本。 【EN】The invention discloses a die for manufacturing an alkali metal wax packet and a preparation and use method thereof, wherein the die comprises a silicon substrate; the silicon substrate includes: a semi-structure spacer located at an edge of the silicon substrate; and a silicon substrate central portion; a plurality of wax-sealed package bearing cavities are formed in the upper surface of the central part of the silicon substrate in an inward sinking manner; a bearing cavity isolating body is formed between the adjacent wax-sealed package bearing cavities; a release sacrificial layer is formed on the upper surface of the silicon substrate, and a paraffin layer is formed on the upper surface of the release sacrificial layer, which is far away from the silicon substrate; a cavity for bearing alkali metal is formed on one side of the paraffin layer, which is far away from the release sacrificial layer; the semi-structural separator includes corrosion release holes therein. The method can reliably and controllably realize batch manufacturing of uniform and consistent alkali metal wax package arrays, is completely compatible with MEMS and microelectronic processes, and has simple and easy-to-implement process flow and strong operability; and the wax encapsulation mould can be repeatedly used, which is beneficial to avoiding the waste of raw materials and effectively reducing the cost of batch manufacturing.

摘要：【中文】本发明公开一种阴极热子组件，包括：外筒；阴极‑热子结构；以及热屏；热屏包括位于内侧的呈筒状结构的内热屏以及位于内热屏外侧的呈筒状结构的外热屏；内热屏与外热屏之间通过一呈筒状结构的热屏支撑件连接固定；热屏支撑件包括第一侧壁部；第二侧壁部；以及台阶部；内热屏一端部的至少部分端部内表面贴合固定在所述第二侧壁部的外侧壁表面上；台阶部的顶面上包括有与内热屏一端部端面相贴合固定的贴合部，以及与内热屏一端部端面呈非贴合固定的非贴合部。本发明在能够保证热屏支撑件结构强度以及可靠性的前提下，可以有减少阴极‑热子结构与热屏之间的热传导路径，从而提高阴极‑热子结构的加热效率。 【EN】The invention discloses a cathode heater assembly, comprising: an outer cylinder; a cathode-thermionic structure; and a thermal shield; the heat shield comprises an inner heat shield which is positioned at the inner side and is of a cylindrical structure and an outer heat shield which is positioned at the outer side of the inner heat shield and is of a cylindrical structure; the inner heat shield and the outer heat shield are fixedly connected through a heat shield supporting piece in a cylindrical structure; the heat shield support includes a first sidewall portion; a second side wall portion; and a step portion; at least part of the inner surface of the end part of one end part of the inner heat shield is fixedly attached to the surface of the outer side wall of the second side wall part; the top surface of the step part comprises a fitting part which is fitted and fixed with one end surface of the inner heat shield and a non-fitting part which is not fitted and fixed with one end surface of the inner heat shield. On the premise of ensuring the structural strength and reliability of the heat shield supporting piece, the invention can reduce the heat conduction path between the cathode-thermionic structure and the heat shield, thereby improving the heating efficiency of the cathode-thermionic structure.

摘要：【中文】本发明公开一种柱状镍海绵氧化物阴极的制备方法，包括如下步骤：(1)将预处理后的柱状阴极基底插入芯杆端部的柱形凹陷部，然后将插有柱状阴极基底的芯杆放入套筒内，所述柱状阴极基底与芯杆端部上方的套筒内壁形成有环绕一周的间隙；(2)将所述间隙内充满镍粉，并滴加粘结剂；(3)烘干，将柱状阴极基底和附着在其外壁上的镍粉与套筒和芯杆分离；然后将柱状阴极基底和附着在其外壁上的镍粉在氢气气氛中烧结，镍粉转化为镍海绵层；(4)使镍海绵层内部充满三元碳酸盐，得到柱状镍海绵氧化物阴极。该制备方法阴极表面光滑、尺寸易于控制，一致性好，并且制备工艺容易操作，制备成本低和生产效率高。 【EN】The invention discloses a preparation method of a columnar nickel sponge oxide cathode, which comprises the following steps: (1) inserting the pretreated columnar cathode substrate into a columnar depressed part at the end part of a core rod, then placing the core rod inserted with the columnar cathode substrate into a sleeve, wherein a clearance surrounding one circle is formed between the columnar cathode substrate and the inner wall of the sleeve above the end part of the core rod; (2) filling nickel powder in the gap, and dripping a binder; (3) drying, separating the columnar cathode substrate and the nickel powder attached to the outer wall of the columnar cathode substrate from the sleeve and the core rod; then sintering the columnar cathode substrate and the nickel powder attached to the outer wall of the columnar cathode substrate in a hydrogen atmosphere, and converting the nickel powder into a nickel sponge layer; (4) and filling ternary carbonate in the nickel sponge layer to obtain the columnar nickel sponge oxide cathode. The preparation method has the advantages of smooth cathode surface, easy size control, good consistency, easy preparation process operation, low preparation cost and high production efficiency.

摘要：【中文】本发明公开一种小直径螺旋线溅铜模具及该模具的使用方法，所述模具包括有呈框架结构的主体；所述主体包括：顶壁部；底壁部；以及两相对设置的侧壁部；还包括有固定架，固定架的两个端部分别结合固定在侧壁部上；顶壁部上包括有贯穿所述顶壁部上下两侧表面的固定孔；固定架上包括有贯穿所述固定架上下两侧表面的通孔；固定孔与所述通孔对应同轴配置。利用本发明提供的模具可以实现内径小于0.4mm的小直径螺旋线内表面的溅铜，且溅铜厚度均匀，大大缩短了溅铜工艺装配时间。 【EN】The invention discloses a small-diameter spiral copper-sputtering mold and a use method thereof, wherein the mold comprises a main body in a frame structure; the main body includes: a top wall portion; a bottom wall portion; and two oppositely arranged side wall parts; the fixing frame is also included, and two end parts of the fixing frame are respectively combined and fixed on the side wall part; the top wall part comprises a fixing hole penetrating through the upper side surface and the lower side surface of the top wall part; the fixing frame comprises a through hole penetrating through the upper side surface and the lower side surface of the fixing frame; the fixing hole and the through hole are correspondingly and coaxially configured. The mold provided by the invention can realize copper sputtering on the inner surface of the small-diameter spiral line with the inner diameter less than 0.4mm, the copper sputtering thickness is uniform, and the copper sputtering process assembly time is greatly shortened.