摘要：【中文】本发明涉及光电子材料技术领域，公开了一种8英寸铌酸锂晶体的生产方法，包括如下步骤：（1）多晶原料的制备：将碳酸锂和氧化铌原料混合烧结后压块破碎，得到多晶原料；（2）晶体的生长：将多晶原料放入位于多层温场中的铂金坩埚内，采用提拉法进行晶体生长，经过引晶、缩颈、放肩、收肩、等径生长、拉脱后得到多畴晶体；（3）晶体的退火和极化：将多畴晶体埋入多晶原料中，进行退火和极化，得到所述8英寸铌酸锂晶体。本发明晶体生长过程中采用多层温场，保证温场均匀无突变，避免晶体多晶和开裂，晶体生长更容易控制；采用埋粉法退火极化，晶体不易开裂；制备多晶原料时进行多次混合烧料，可以确保晶体居里温度稳定。 【EN】The invention relates to the technical field of photoelectron materials, and discloses a production method of 8-inch lithium niobate crystals, which comprises the following steps: (1) preparing a polycrystalline raw material: mixing and sintering lithium carbonate and niobium oxide raw materials, and then briquetting and crushing to obtain a polycrystalline raw material; (2) and (3) crystal growth: putting the polycrystalline raw material into a platinum crucible in a multilayer thermal field, performing crystal growth by adopting a pulling method, and performing seeding, necking, shouldering, isodiametric growth and pulling-off to obtain a multi-domain crystal; (3) annealing and polarization of the crystal: and embedding the multi-domain crystal into a polycrystalline raw material, and annealing and polarizing to obtain the 8-inch lithium niobate crystal. In the crystal growth process, a multilayer temperature field is adopted, so that the temperature field is uniform and free of mutation, crystal polycrystal and cracking are avoided, and the crystal growth is easier to control; the crystal is not easy to crack by adopting the powder embedding method for annealing polarization; and the materials are mixed and fired for many times when the polycrystalline raw material is prepared, so that the Curie temperature of the crystal can be ensured to be stable.

摘要：【中文】本发明涉及光电子材料技术领域，公开了一种8英寸铌酸锂晶片的制备方法，包括如下步骤：（1）切割及一次腐蚀：将8英寸铌酸锂晶体切割成晶片后放入腐蚀液中进行一次腐蚀；（2）还原黑化；（3）减薄及二次腐蚀：将还原黑化后的晶片双面减薄，清洗干净后再放入腐蚀液中进行二次腐蚀；（4）抛光；（5）三次腐蚀：将抛光后的晶片放入腐蚀液中进行三次腐蚀，清洗后得所述8英寸铌酸锂晶片。本发明采用三次腐蚀法解决了铌酸锂晶片内部应力变形严重及因此产生的晶片生产过程中容易碎裂的问题；抛光过程中采用多孔陶瓷盘吸附，解决了传统的贴蜡工艺引起的TTV不易控制的问题；加工过程中不用粘合剂，不接触有机物，晶片比较容易清洗。 【EN】The invention relates to the technical field of photoelectron materials, and discloses a preparation method of an 8-inch lithium niobate wafer, which comprises the following steps: (1) cutting and primary corrosion: cutting 8-inch lithium niobate crystal into wafers, and then putting the wafers into a corrosive liquid for primary corrosion; (2) reducing and blackening; (3) thinning and secondary corrosion: thinning the two sides of the reduced and blackened wafer, cleaning the wafer, and then putting the wafer into a corrosive liquid for secondary corrosion; (4) polishing; (5) and (3) third corrosion: and putting the polished wafer into a corrosive liquid for corrosion for three times, and cleaning to obtain the 8-inch lithium niobate wafer. The invention adopts a three-time corrosion method to solve the problems of serious stress deformation inside the lithium niobate wafer and easy fragmentation in the production process of the wafer; the polishing process adopts a porous ceramic disc for adsorption, so that the problem that TTV is difficult to control caused by the traditional wax pasting process is solved; the processing process does not use adhesive and contact organic matters, and the wafer is easy to clean.