摘要：【中文】本发明提供一种双真空室大功率电子束蒸发连续镀膜装置，包括多功能室、电子束蒸发室、真空抽气系统及控制系统，所述多功能室与所述电子束蒸发室连通设置，两室之间通过插板阀隔离；所述真空抽气系统对所述多功能室与所述电子束蒸发室进行抽真空，所述多功能室、电子束蒸发室、真空抽气系统与控制系统电性连接。采用本发明提供的双真空室大功率电子束蒸发连续镀膜装置，能够保证电子枪装置及坩埚装置始终处于真空环境，使坩埚中高温熔融状态的金属材料不被空气氧化，减少因等待坩埚冷却所需要的时间及大量的抽气时间，大幅提高生产效率。 【EN】The invention provides a double-vacuum-chamber high-power electron beam evaporation continuous coating device which comprises a multifunctional chamber, an electron beam evaporation chamber, a vacuum pumping system and a control system, wherein the multifunctional chamber is communicated with the electron beam evaporation chamber, and the two chambers are isolated by a gate valve; the vacuum pumping system is used for vacuumizing the multifunctional chamber and the electron beam evaporation chamber, and the multifunctional chamber, the electron beam evaporation chamber and the vacuum pumping system are electrically connected with the control system. The double-vacuum-chamber high-power electron beam evaporation continuous coating device provided by the invention can ensure that the electron gun device and the crucible device are always in a vacuum environment, so that the metal material in a high-temperature molten state in the crucible is not oxidized by air, the time required by waiting for cooling the crucible and a large amount of air extraction time are reduced, and the production efficiency is greatly improved.

摘要：【中文】本发明提供一种离子镀膜与电子束蒸发镀膜结合的镀膜装置，包括：离子镀膜组件、电子束蒸发镀膜组件、被镀基材、坩埚和真空室，所述真空室左右两侧设置离子镀膜组件，所述真空室的上方设置电子束蒸发镀膜组件，所述被镀基材设置在所述真空室的中部，所述坩埚设置在所述被镀基材的下方。本发明还提供一种镀膜方法，通过离子镀膜方法在被镀基材表面上用金属离子轰击清洗打底沉积一层薄薄的金属膜层形成金属过渡层，再用大功率电子束蒸发镀膜的方法进行快速沉积形成膜层，由于金属过渡层的存在，增强了膜层组合的多元性以及增加了膜层用途的多功能性，因此，本发明提供的镀膜方法能大幅提高所镀膜层的结合力及沉积速率。 【EN】The invention provides a coating device combining an ion coating and an electron beam evaporation coating, which comprises: the vacuum chamber comprises an ion coating component, an electron beam evaporation coating component, a coated substrate, a crucible and a vacuum chamber, wherein the ion coating component is arranged on the left side and the right side of the vacuum chamber, the electron beam evaporation coating component is arranged above the vacuum chamber, the coated substrate is arranged in the middle of the vacuum chamber, and the crucible is arranged below the coated substrate. The invention also provides a film coating method, which comprises the steps of cleaning and priming a thin metal film layer by using metal ion bombardment on the surface of a coated substrate by using an ion film coating method to form a metal transition layer, and rapidly depositing to form the film layer by using a high-power electron beam evaporation film coating method.

摘要：【中文】本发明提供一种新型带钢真空镀膜设备及工艺，属于带钢加工技术领域。所述的新型带钢真空镀膜设备，包括依次连通的第一真空压差室、预热室、镀膜室、冷却室、第二真空压差室，所述镀膜室包括第一镀膜室和第二镀膜室，所述第一镀膜室设有对带钢一面进行镀膜的第一镀膜机构，所述第二镀膜室沿带钢水平运行方向的下方设有若干导向辊，带钢与设于水平线上的导向辊水平相切，并与设于下方的各个导向辊连接形成容纳空间，所述容纳空间内设有第二镀膜机构。本申请是针对典型带钢镀膜工艺的真空镀膜设备提出了一个新的设计方案，使设备的各个真空室都安装在同一水平面上，降低设备安装高度，方便操作和维修，减少导向辊的数量，降低生产成本。 【EN】The invention provides novel strip steel vacuum coating equipment and a novel strip steel vacuum coating process, and belongs to the technical field of strip steel processing. Novel belted steel vacuum coating equipment, including first vacuum differential pressure room, preheating chamber, coating film room, cooling chamber, the second vacuum differential pressure room that communicates in proper order, the coating film room includes first coating film room and second coating film room, first coating film room is equipped with carries out the first coating film mechanism of coating film to belted steel one side, second coating film room is equipped with a plurality of guide rolls along belted steel horizontal movement direction's below, belted steel is tangent with the guide roll level of locating on the water flat line to be connected with each guide roll of locating the below and form accommodation space, be equipped with second coating film mechanism in the accommodation space. The vacuum coating equipment for the typical strip steel coating process provides a new design scheme, so that each vacuum chamber of the equipment is arranged on the same horizontal plane, the installation height of the equipment is reduced, the operation and the maintenance are convenient, the number of guide rollers is reduced, and the production cost is reduced.