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申请号:201811033489.7 公开号:CN110880476A 主分类号:H01L21/768
申请人:【中文】长鑫存储技术有限公司【EN】CHANGXIN MEMORY TECHNOLOGIES, Inc. 申请日:2018.09.05 公开日:2020.03.13
摘要:【中文】本发明提供一种互连结构及其制作方法、半导体器件,所述制作方法包括:在基底上形成第一层间介质层,刻蚀第一层间介质层,形成贯穿第一层间介质层的多个凹槽,然后依次在凹槽的侧壁形成牺牲层与低介电常数介质层,接着在凹槽内形成金属互连线,然后去除牺牲层,以在金属互连线的侧壁形成间隙,最后形成绝缘层,绝缘层覆盖第一层间介质层、金属互连线与所述低介电常数介质层,并遮盖间隙的顶部开口,以封闭间隙形成空气隙,空气隙位于相邻金属互连线之间,且空气隙具有较小的介电常数,能够减小相邻金属互连线之间的寄生电容,从而减少寄生电容造成的RC延迟。 【EN】The invention provides an interconnection structure, a manufacturing method thereof and a semiconductor device, wherein the manufacturing method comprises the following steps: the method comprises the steps of forming a first interlayer dielectric layer on a substrate, etching the first interlayer dielectric layer, forming a plurality of grooves penetrating through the first interlayer dielectric layer, sequentially forming a sacrificial layer and a low-dielectric-constant dielectric layer on the side walls of the grooves, forming metal interconnection lines in the grooves, removing the sacrificial layer to form gaps on the side walls of the metal interconnection lines, and finally forming an insulating layer, wherein the insulating layer covers the first interlayer dielectric layer, the metal interconnection lines and the low-dielectric-constant dielectric layer and covers top openings of the gaps to form air gaps in a closed mode, the air gaps are located between adjacent metal interconnection lines, have small dielectric constants, can reduce parasitic capacitance between the adjacent metal interconnection lines, and accordingly reduce RC delay caused by the parasitic capacitance.
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申请号:201911220105.7 公开号:CN110907227A 主分类号:G01N1/14
申请人:【中文】胡双双【EN】Hu Shuangshuang 申请日:2019.12.03 公开日:2020.03.24
摘要:【中文】本发明公开了一种污水池用可调节取样装置,涉及取样装置技术领域。该发明包括取样管,取样管内部固定有隔板,取样管表面固定有若干调节膜,取样管外圈固定有安装管,安装管一侧固定有安装框,安装框内部固定有弹簧,弹簧一端固定有夹板,夹板一侧固定有把手,安装框内部活动连接有安装块,安装块一侧固定有连接杆,连接杆一端固定有过滤网,取样管外侧套接有安装板,安装板一侧固定有螺纹管,螺纹管内部螺纹连接有螺纹杆,螺纹杆一端固定有第一转轴,第一转轴外侧固定有活动杆。本发明通过隔板的作用,该装置可以一次存储多个样本,且样本之间互不干扰,该装置比起传统取样器结构合理,操作简单,且更加便携,使取样效率更高。 【EN】The invention discloses an adjustable sampling device for a sewage pool, and relates to the technical field of sampling devices. The sampling tube comprises a sampling tube, a partition plate is fixed inside the sampling tube, a plurality of adjusting films are fixed on the surface of the sampling tube, an installation tube is fixed on the outer ring of the sampling tube, an installation frame is fixed on one side of the installation tube, a spring is fixed inside the installation frame, a clamping plate is fixed at one end of the spring, a handle is fixed on one side of the clamping plate, an installation block is movably connected inside the installation frame, a connecting rod is fixed on one side of the installation block, a filter screen is fixed at one end of the connecting rod, an installation plate is sleeved on the outer side of the sampling tube, a threaded tube is fixed on one side of the installation plate, a threaded rod is connected inside the threaded tube in. The device can store a plurality of samples at one time under the action of the partition plates, the samples are not interfered with each other, and the device has a reasonable structure, is simple to operate and more portable compared with the traditional sampler, and ensures that the sampling efficiency is higher.
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申请号:201811149809.5 公开号:CN110970460A 主分类号:H01L27/24
申请人:【中文】长鑫存储技术有限公司【EN】CHANGXIN MEMORY TECHNOLOGIES, Inc. 申请日:2018.09.29 公开日:2020.04.07
摘要:【中文】本发明提供了一种电容器阵列及其形成方法、半导体器件。在基底器件区上形成下电极、支撑层及上电极后,通过在上电极上形成一氧化层,以在器件区边缘形成一平坦的电容阵列边界,并在电容阵列边界增加保护层,有效规避了后续沉积填充材料时由于电容阵列边界不平整而形成裂缝进而造成的短路问题,提高电容器件的可靠性。 【EN】The invention provides a capacitor array, a forming method thereof and a semiconductor device. After a lower electrode, a supporting layer and an upper electrode are formed on a substrate device area, an oxide layer is formed on the upper electrode to form a flat capacitor array boundary at the edge of the device area, and a protective layer is added on the capacitor array boundary, so that the problem of short circuit caused by cracks formed due to uneven capacitor array boundary during subsequent deposition of filling materials is effectively solved, and the reliability of a capacitor device is improved.
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申请号:201811151394.5 公开号:CN110970402A 主分类号:H01L23/64
申请人:【中文】长鑫存储技术有限公司【EN】CHANGXIN MEMORY TECHNOLOGIES, Inc. 申请日:2018.09.29 公开日:2020.04.07
摘要:【中文】本发明提供了一种电容器阵列结构、半导体器件及其制备方法,在原有电容阵列结构的边界基础上增加一由绝缘材料形成的边界保护层,能够将在导电接触插塞制作工艺中由于电容阵列结构边界不平整产生的裂缝与电容阵列结构边界分隔开,从而避免因所述裂缝而造成导电接触插塞与电容阵列结构边界短路的问题,提高电容器件的可靠性。 【EN】The invention provides a capacitor array structure, a semiconductor device and a preparation method thereof, wherein a boundary protection layer formed by an insulating material is added on the basis of the boundary of the original capacitor array structure, so that a crack generated by the unevenness of the boundary of the capacitor array structure in the manufacturing process of a conductive contact plug can be separated from the boundary of the capacitor array structure, the problem of short circuit of the boundary of the conductive contact plug and the capacitor array structure caused by the crack is avoided, and the reliability of the capacitor device is improved.
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申请号:201911295444.1 公开号:CN111021508A 主分类号:E03F3/06
摘要:【中文】本发明公开了一种地下排水管道施工工艺,涉及管道施工技术领域,其包括如下步骤:S100、测量放线;S200、井点安装;S300、沟槽开挖;S400、管道砼基础;S500、管道安装;S600、管道回填;通过采用机械挖土为主,人工辅助的方法。当机械挖至距槽底30‑40厘米时即用人工修坡,清理槽底余土,以防止机械超挖,扰动原状土;人机挖土比例为20:80,土方堆放在槽边1.5米以外处本发明的施工简单方便,施工难度较低,施工影响时间被大大缩短,同时本发明对原有结构破坏较小,整体连接构造可靠性较高,管道的密封性强,对结构安全影响较小。 【EN】The invention discloses a construction process of underground drainage pipelines, which relates to the technical field of pipeline construction and comprises the following steps: s100, measuring and paying off; s200, well point installation; s300, excavating a groove; s400, pipeline concrete foundation; s500, installing a pipeline; s600, backfilling a pipeline; the method mainly adopts mechanical soil excavation and adopts a manual assistance method. When the machine is dug to be 30-40 cm away from the bottom of the tank, the slope is repaired manually, and the residual soil at the bottom of the tank is cleaned, so that the machine is prevented from being over-dug and the undisturbed soil is disturbed; the man-machine excavation proportion is 20: 80, the invention has simple and convenient construction, lower construction difficulty and greatly shortened construction influence time, and simultaneously has less damage to the original structure, higher reliability of the integral connection structure, strong pipeline sealing property and less influence on the structure safety.
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申请号:201880056527.2 公开号:CN111050661A 主分类号:A61B8/08
摘要:【中文】本实施例公开了一种剪切波弹性测量方法及剪切波弹性成像系统,对于每对相应的剪切波,可以只在第三位置获取连续一段时间内的回波信号,就可以根据该连续一段时间内的回波信号来获取所述目标区域对应的弹性参数,不仅所需的用于获取回波信号的位置少,而且需要获取的回波信号的总数据量也少,并且计算方法也简单,这对系统的性能要求大大降低。 【EN】The embodiment discloses a shear wave elasticity measurement method and a shear wave elasticity imaging system, for each pair of corresponding shear waves, only echo signals in a continuous period of time can be acquired at a third position, and elasticity parameters corresponding to a target region can be acquired according to the echo signals in the continuous period of time, so that the required positions for acquiring the echo signals are few, the total data volume of the echo signals required to be acquired is also small, the calculation method is simple, and the performance requirement of the system is greatly reduced.
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申请号:201811432998.7 公开号:CN111232027A 主分类号:B62B3/00
摘要:【中文】本发明公开了一种新型纺织推车,包括底板,底板的四角均固定连接有支腿,支腿的底端穿过底板底面安装有车轮,支腿的顶端穿过底板顶面固定连接有同一个第一箱体,第一箱体的底端固定连接有进水管并与其连通,进水管的底端穿过水箱内顶壁固定连接有水泵的出水口。本发明本装置在使用时,将纺织布安放在两个三棱板之间的夹缝里,可有效的起到固定作用,避免在纺织推车推动时晃动掉落,并且纺织推车使用时间久会粘有纺织尘在三棱板上,所以需要定期处理清洗,清洗时,多个喷头对三棱板之间的夹缝进行清洗,使得清洗更加干净,如果清洗后要时使用时,可打开吹风机通过第二箱体上的出风口,对清洗后的三棱板进行及时吹干,避免影响使用。 【EN】The invention discloses a novel spinning cart which comprises a bottom plate, wherein four corners of the bottom plate are fixedly connected with supporting legs, the bottom ends of the supporting legs penetrate through the bottom surface of the bottom plate and are provided with wheels, the top ends of the supporting legs penetrate through the top surface of the bottom plate and are fixedly connected with a first box body, the bottom end of the first box body is fixedly connected with a water inlet pipe and communicated with the first box body, and the bottom end of the water inlet pipe penetrates through the inner top wall of a water tank and is fixedly. When the device is used, the textile cloth is placed in the gap between the two triangular plates, so that the fixing effect can be effectively achieved, the textile cart is prevented from shaking and falling off when pushed, textile dust can be adhered to the triangular plates when the textile cart is used for a long time, the textile cart needs to be periodically treated and cleaned, the gap between the triangular plates is cleaned by the plurality of spray heads during cleaning, the cleaning is enabled to be cleaner, and if the textile cart is used for cleaning, the blower can be opened to pass through the air outlet in the second box body to blow the cleaned triangular plates timely, so that the use is prevented from being influenced.
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申请号:201811432999.1 公开号:CN111232759A 主分类号:B65H75/14
摘要:【中文】一种纺织机筒管,包括主杆,主杆侧面底端固定有固定板,固定板正上端设有挡板,挡板侧端与主杆侧壁固定连接,挡板与固定板之间设有夹板,夹板内旋转连接有第一转盘,第一转盘底端固定有第一螺纹杆,第一螺纹杆底端穿透固定板固定连接有第一把手,第一螺纹杆与固定板接触处螺纹连接,主杆上套有套筒。本发明纺织机筒管,通过第一轴承和第二轴承的设置,辊筒可以在套筒上转动,这样当纺织机拉动丝线时,丝线拉动辊筒旋转的拉力减小,从而有效的避免了丝线被拉断的情况发生。并且由于圆管的设置,由于丝线线头穿过圆管放置,这样筒管在储存或转运下一工序时丝线线头不会出现松散或相互缠绕在一起的情况出现,有效的提高了生产效率。 【EN】The utility model provides a weaving machine bobbin, includes the mobile jib, mobile jib side bottom mounting has the fixed plate, is equipped with the baffle directly over the fixed plate, baffle side and mobile jib lateral wall fixed connection are equipped with splint between baffle and the fixed plate, splint internal rotation connection has first carousel, and first carousel bottom is fixed with first threaded rod, and the first threaded rod bottom pierces through the fixed plate fixedly connected with first in command, and first threaded rod and fixed plate contact department threaded connection have the sleeve on the mobile jib. According to the textile machine bobbin disclosed by the invention, the roller can rotate on the sleeve through the arrangement of the first bearing and the second bearing, so that when a textile machine pulls a silk thread, the rotating pulling force of the silk thread pulling roller is reduced, and the situation that the silk thread is pulled to be broken is effectively avoided. And because the setting of pipe, because the silk thread end of a thread passes the pipe and places, the bobbin can not appear loose or the condition that intertwine is in the same place when storing or transporting next process like this, effectual improvement production efficiency.
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申请号:201811433226.5 公开号:CN111228942A 主分类号:B01D50/00
摘要:【中文】一种纺织机纺织尘收集装置,包括水箱,水箱底端两侧分别固定有支杆,两个支杆底端固定有同一个底座,水箱底端中央固定有出水管,出水管与水箱内部相通设置,出水管底端螺纹连接有盖体,水箱顶端中央固定有电机。本发明纺织机纺织尘收集装置,能够对纱线编织成布料时产生的粉尘进行收集,能够保证车间环境的整洁,过滤网能够对较大颗粒的粉尘和中等颗粒的粉尘进行过滤,通过水箱可以过滤掉空气中的微粒粉尘,通过分阶段,能有效的提高空气过滤质量,并且由于毛刷和第一毛刷的设置,清理内部结构时方便,有效的提高了实用性能,而且由于设有多个软管和漏斗形吸尘口,哪里产生的粉尘较多就可以往哪里防止漏斗形吸尘口,目的性强,工作效率高。 【EN】The utility model provides a weaving machine weaving dirt collection device, includes the water tank, and water tank bottom both sides are fixed with branch respectively, and two branch bottom fixings have same base, and water tank bottom central authorities are fixed with the outlet pipe, and the outlet pipe communicates with each other with the inside setting of water tank, and outlet pipe bottom threaded connection has the lid, and water tank top central authorities are fixed with the motor. The textile machine textile dust collecting device can collect dust generated when yarns are woven into cloth, can ensure the cleanness of a workshop environment, can filter large and medium-sized dust particles through the filter screen, can filter particle dust in air through the water tank, can effectively improve the air filtering quality in stages, is convenient to clean an internal structure due to the arrangement of the hairbrush and the first hairbrush, effectively improves the practicability, can prevent the funnel-shaped dust suction opening from being formed in a large amount of dust, and is strong in purpose and high in working efficiency.
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申请号:202010178229.X 公开号:CN111227726A 主分类号:A47L11/284
申请人:【中文】刘双双【EN】Liu Shuangshuang 申请日:2020.03.14 公开日:2020.06.05
摘要:【中文】本发明公开了一种自清洁拖把,包括有壳体、把手;壳体内设置有抹布组件;抹布组件包括四个轴线垂直于壳体前端面的传动辊,以及依次套在各个传动辊之间的拖地布;各个传动辊的转速不同,使得位于所述壳体下方的拖地布处于拉伸状态,位于壳体内的拖地布处于收缩状态;壳体内安装有驱动各个传动辊转动的电机;壳体内位于洗涤部下方安装有过滤箱;壳体内位于过滤箱正上方安装有能够喷射出用于清洗洗涤部的水的喷水管;过滤箱内安装有陶瓷过滤板;壳体上安装有将过滤箱内的水抽出并从喷水管喷出的水泵。处于拉伸状态的拖地布将地面的赃物附着在表面,处于收缩状态的拖地布将附着在表面的赃物夹紧。 【EN】The invention discloses a self-cleaning mop, which comprises a shell and a handle; a rag component is arranged in the shell; the mop cloth component comprises four driving rollers with axes vertical to the front end surface of the shell and mop cloth sleeved among the driving rollers in sequence; the rotating speeds of the driving rollers are different, so that the mopping cloth positioned below the shell is in a stretching state, and the mopping cloth positioned in the shell is in a contracting state; a motor for driving each transmission roller to rotate is arranged in the shell; a filter box is arranged in the shell below the washing part; a water spray pipe capable of spraying water for cleaning the washing part is arranged in the shell and is positioned right above the filter tank; a ceramic filter plate is arranged in the filter box; the shell is provided with a water pump which pumps water in the filter tank and sprays the water from the spray pipe. The mop cloth in the stretching state can attach the dirt on the ground to the surface, and the mop cloth in the contraction state can clamp the dirt attached to the surface.
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