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申请号:201811177619.4 公开号:CN111029273A 主分类号:H01L21/67
申请人:【中文】沈阳芯源微电子设备股份有限公司【EN】KINGSEMI Co.,Ltd. 申请日:2018.10.10 公开日:2020.04.17
摘要:【中文】本发明涉及晶圆清洗技术领域,具体地说是一种低接触晶圆翻转系统,包括支承架、晶圆翻转机构、活动夹持臂和固定夹持臂,所述支承架上设有转盘,所述活动夹持臂可移动地设置于所述转盘上,所述固定夹持臂固设于所述转盘上,晶圆翻转机构设置于所述支承架上,且所述晶圆翻转机构包括移动驱动装置和旋转驱动装置,所述活动夹持臂通过所述移动驱动装置驱动在所述转盘上移动,所述转盘通过所述旋转驱动装置驱动旋转,在所述固定夹持臂下侧设有气流颗粒控制系统。本发明能够自动实现晶圆检测、夹持和翻转,整个过程控制精确,大大提高了晶圆生产效率和清洗质量。 【EN】The invention relates to the technical field of wafer cleaning, in particular to a low-contact wafer overturning system which comprises a supporting frame, a wafer overturning mechanism, a movable clamping arm and a fixed clamping arm, wherein a turntable is arranged on the supporting frame, the movable clamping arm is movably arranged on the turntable, the fixed clamping arm is fixedly arranged on the turntable, the wafer overturning mechanism is arranged on the supporting frame and comprises a movement driving device and a rotation driving device, the movable clamping arm is driven by the movement driving device to move on the turntable, the turntable is driven by the rotation driving device to rotate, and an airflow particle control system is arranged on the lower side of the fixed clamping arm. The invention can automatically realize the detection, clamping and overturning of the wafer, the whole process is accurately controlled, and the production efficiency and the cleaning quality of the wafer are greatly improved.
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申请号:201911085238.8 公开号:CN110941896A 主分类号:G06F30/20
申请人:【中文】江苏科技大学【EN】JIANGSU UNIVERSITY OF SCIENCE AND TECHNOLOGY 申请日:2019.11.08 公开日:2020.03.31
摘要:【中文】本发明提出了一种基于PGP的超宽带天线的设计方法,包括以下步骤:S000:采用训练数据库对GP模型进行迭代训练,得到PGP模型;S100:采用PSO算法对PGP模型寻优,得到满足指标的超宽带天线尺寸参数。本发明利用了高斯过程的预测方差这一特性筛选出对新样本获取有效的数据点,通过不断更新数据库来达到对模型精度的要求,提高泛化能力。本发明可以快速获得PGP模型的训练数据,克服了GP模型对复杂天线数据获取困难的问题。PGP模型训练完成以后,利用其对超宽带天线进行优化,得到满足指标的超宽带天线尺寸,PGP测试输出都较好的贴合HFSS精确数值,可见本发明方法构造的渐进高斯过程确实有较高的稳定性。 【EN】The invention provides a design method of a PGP-based ultra-wideband antenna, which comprises the following steps: s000: performing iterative training on the GP model by adopting a training database to obtain a PGP model; s100: and optimizing the PGP model by adopting a PSO algorithm to obtain the ultra-wideband antenna size parameter meeting the index. The method utilizes the characteristic of the prediction variance of the Gaussian process to screen out effective data points acquired by a new sample, and achieves the requirement on model precision by continuously updating the database, thereby improving the generalization ability. The method can quickly obtain the training data of the PGP model, and solves the problem that the GP model is difficult to obtain the complex antenna data. After the PGP model training is completed, the ultra-wideband antenna is optimized by using the PGP model training method, the ultra-wideband antenna size meeting the index is obtained, the PGP test output is better fit with the HFSS accurate value, and the progressive Gaussian process constructed by the method provided by the invention is really higher in stability.
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申请号:201911103984.5 公开号:CN111221756A 主分类号:G06F13/28
摘要:【中文】本发明公开了一种上位机软件高效传输数据到下层设备的方法,所述方法包括:上位机初始化内存分配结构,并将初始化后的相关信息写入下层设备;上位机和下层设备分别建立一个深度为M、N的循环队列用来存储相应的信息;数据传输时,上位机软件将待传输数据拷贝放入序号为a的大块内存块的第c个子分块,然后将序号a、序号c和数据长度L整合为一个数值R,通过写寄存器的方式将该值写给下层设备;下层设备通过计算获得数据存放的物理地址ADDR,然后根据整合值R中解析出来的数据长度L发起DMA操作获取数据。本发明的所述方法具有较为简单的处理流程、较好的跨系统移植性和较高的传输效率。 【EN】The invention discloses a method for efficiently transmitting data to lower-layer equipment by upper computer software, which comprises the following steps: the upper computer initializes the memory allocation structure and writes the initialized related information into the lower-layer equipment; the upper computer and the lower layer equipment respectively establish a circular queue with the depth of M, N to store corresponding information; when data is transmitted, the upper computer software copies the data to be transmitted into the c sub-block of the large block memory block with the sequence number a, integrates the sequence number a, the sequence number c and the data length L into a numerical value R, and writes the numerical value R to the lower-layer equipment in a register writing mode; the lower layer device obtains a physical address ADDR for storing the data through calculation, and then initiates DMA operation to obtain the data according to the data length L analyzed from the integration value R. The method of the invention has the advantages of simpler processing flow, better cross-system portability and higher transmission efficiency.
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申请号:202010052252.4 公开号:CN111244585A 主分类号:H01P1/18
申请人:【中文】中山大学【EN】SUN YAT-SEN University 申请日:2020.01.17 公开日:2020.06.05
摘要:【中文】本发明公开了一种具有滤波功能的差分移相器,包括:介质基板、金属地层和微带结构,金属地层和微带结构设置在介质基板上,所述微带结构包括相互独立的第一二端口网络和第二二端口网络,所述第一二端口网络和所述第二二端口网络结构均包括时延线、耦合线和传输线网络,所述传输线网络与所述时延线、所述耦合线连接,其中所述耦合线的电长度为中心频率对应波长的四分之一,所述传输线网络包括第一传输线,所述第一传输线的电长度为中心频率对应波长的四分之三。本发明使得信号通过时,耦合线和第一传输线的电长度相差180度,信号产生相干相消,在中心频点处保留通带,在带宽外产生阻带,实现滤波功能,可广泛应用于移相器领域。 【EN】The invention discloses a differential phase shifter with a filtering function, which comprises: the microstrip structure comprises a first two-port network and a second two-port network which are independent of each other, the first two-port network and the second two-port network respectively comprise a delay line, a coupling line and a transmission line network, the transmission line network is connected with the delay line and the coupling line, the electrical length of the coupling line is one fourth of the wavelength corresponding to the center frequency, the transmission line network comprises a first transmission line, and the electrical length of the first transmission line is three quarters of the wavelength corresponding to the center frequency. When the signal passes through the phase shifter, the difference between the electrical lengths of the coupling line and the first transmission line is 180 degrees, the signal is subjected to coherence cancellation, a passband is reserved at a central frequency point, a stop band is generated outside the bandwidth, the filtering function is realized, and the phase shifter can be widely applied to the field of phase shifters.
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申请号:201811201811.2 公开号:CN111063652A 主分类号:H01L21/687
申请人:【中文】沈阳芯源微电子设备股份有限公司【EN】KINGSEMI Co.,Ltd. 申请日:2018.10.16 公开日:2020.04.24
摘要:【中文】本发明属于半导体行业基板湿法处理领域,具体的说是一种基板夹持承载台,包括电机、承载台、升降CUP及固定CUP,电机的输出端与承载台相连,电机外围设有固定CUP,固定CUP的外围设有可升降的升降CUP;承载台上沿圆周方向分别安装有随承载台转动的转动pin及固定pin,转动pin与固定pin均包括柱体及夹持块,固定pin的柱体固接在承载台上,转动pin的柱体转动安装在承载台上,转动pin和固定pin的夹持块均偏心设置在柱体顶部,转动pin的底部安装有转动磁石;固定CUP内设有内磁石,升降CUP内设有外磁石,内磁石与外磁石分别位于转动磁石的内外两侧。本发明对基板正面与背面无磨损、污染,能够带动基板旋转,完成基板工艺处理。 【EN】The invention belongs to the field of substrate wet processing in the semiconductor industry, and particularly relates to a substrate clamping bearing table which comprises a motor, a bearing table, a lifting CUP and a fixed CUP, wherein the output end of the motor is connected with the bearing table, the fixed CUP is arranged on the periphery of the motor, and the lifting CUP capable of being lifted is arranged on the periphery of the fixed CUP; the rotary and fixed pins which rotate along with the plummer are respectively installed on the plummer along the circumferential direction, the rotary and fixed pins comprise a cylinder and a clamping block, the cylinder for fixing the pins is fixedly connected on the plummer, the cylinder for rotating the pins is rotatably installed on the plummer, the clamping blocks for rotating the pins and fixing the pins are eccentrically arranged at the top of the cylinder, and a rotary magnet is installed at the bottom of the rotary pin; an inner magnet is arranged in the fixed CUP, an outer magnet is arranged in the lifting CUP, and the inner magnet and the outer magnet are respectively positioned at the inner side and the outer side of the rotating magnet. The invention has no abrasion and pollution to the front surface and the back surface of the substrate, and can drive the substrate to rotate to complete the process treatment of the substrate.
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申请号:201911097826.3 公开号:CN111062462A 主分类号:G06N3/00
申请人:【中文】中山大学【EN】SUN YAT-SEN University 申请日:2019.11.12 公开日:2020.04.24
摘要:【中文】本发明公开了基于差分进化算法的局部搜索和全局搜索融合方法及系统,方法包括:对种群参数进行初始化配置,生成初始种群;配置局部搜索代数计数器和全局搜索代数计数器;在种群进入局部搜索阶段时,确定局部搜索代数计数器处于上限和下限之间且子种群没有收敛后,种群进入全局搜索阶段;判断全局搜索代数计数器的值是否小于全局搜索代数的上限,若是,则重新执行全局搜索阶段;反之,则返回执行配置局部搜索代数计数器和全局搜索代数计数器的步骤,直至确定达到初始化配置的差分进化算法执行的终止条件后,结束所述差分进化算法。本发明增强了种群的收敛性和探索性,提高了搜索的全面性,高效且复杂度低,可广泛应用于数值优化技术领域。 【EN】The invention discloses a local search and global search fusion method and a system based on a differential evolution algorithm, wherein the method comprises the following steps: carrying out initialization configuration on population parameters to generate an initial population; configuring a local search algebra counter and a global search algebra counter; when the population enters a local search stage, determining that a local search algebraic counter is between an upper limit and a lower limit and a sub-population is not converged, and then entering a global search stage; judging whether the value of the global search algebra counter is smaller than the upper limit of the global search algebra, if so, re-executing the global search stage; otherwise, returning to the step of executing and configuring the local search algebra counter and the global search algebra counter until the termination condition of the execution of the initially configured differential evolution algorithm is determined, and ending the differential evolution algorithm. The invention enhances the convergence and searchability of the population, improves the comprehensiveness of the search, has high efficiency and low complexity, and can be widely applied to the technical field of numerical optimization.
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申请号:201911368697.7 公开号:CN110947630A 主分类号:B07B13/075
摘要:【中文】本发明公开了一种用于智能制造的分拣系统,包括固定块、圆筒、电机一、传输带和取料块,所述固定块的内表面固定连接有圆筒,且圆筒的底表面固定设置有电机一,并且电机一的输出端安装有固定柱,所述固定柱贯穿圆筒的底表面,且圆筒的上表面固定设置有支撑杆,所述支撑杆的上表面固定连接有第一圆环块,且第一圆环块的上表面固定连接有支撑杆,所述支撑杆的顶表面固定连接有第二圆环块。该用于智能制造的分拣系统,该分拣系统装置可通过半径为从小到大递进的第一出料口、第一圆环块、第二圆环块和第三圆环块进行过滤分类,只有适合大小的零部件才能够通过第一圆环块、第二圆环块和第三圆环块,达到分类的效果。 【EN】The invention discloses a sorting system for intelligent manufacturing, which comprises a fixed block, a cylinder, a first motor, a transmission belt and a material taking block, wherein the inner surface of the fixed block is fixedly connected with the cylinder, the bottom surface of the cylinder is fixedly provided with the first motor, the output end of the first motor is provided with a fixed column, the fixed column penetrates through the bottom surface of the cylinder, the upper surface of the cylinder is fixedly provided with a supporting rod, the upper surface of the supporting rod is fixedly connected with a first circular block, the upper surface of the first circular block is fixedly connected with the supporting rod, and the top surface of the supporting rod is fixedly connected with a second circular block. This a letter sorting system for intelligence is made, this letter sorting system device accessible radius filters the classification for first discharge gate, first ring piece, second ring piece and the third ring piece that advances from small to big, and only the spare part that is fit for the size can reach categorised effect through first ring piece, second ring piece and third ring piece.
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申请号:202010083791.4 公开号:CN111155773A 主分类号:E04G21/26
摘要:【中文】本发明提供一种竖向构件支撑装置及安装方法,包括一根空心钢管(6),所述空心钢管(6)两端均通过丝杆螺纹护套(3)和钢管螺纹护套(5)连接带钩可调丝杆(4);所述空心钢管(6)两端的带钩可调丝杆(4)分别与U型斜支撑耳板(1)和U型金属预埋件(8)固定。该装置具有硬度高、耐磨性好、调节精准度高、支设高效便捷、承载力大、稳定性好、易于质量控制、应用面广等优点,适用于大部分竖向预制构件的安装固定。 【EN】The invention provides a vertical component supporting device and an installation method, wherein the vertical component supporting device comprises a hollow steel pipe (6), and two ends of the hollow steel pipe (6) are connected with an adjustable screw rod (4) with a hook through a screw rod thread sheath (3) and a steel pipe thread sheath (5); and the adjustable screw rods (4) with hooks at the two ends of the hollow steel pipe (6) are respectively fixed with the U-shaped inclined supporting ear plate (1) and the U-shaped metal embedded part (8). The device has the advantages of high hardness, good wear resistance, high adjustment precision, high supporting efficiency, convenience, large bearing capacity, good stability, easiness in quality control, wide application range and the like, and is suitable for mounting and fixing most vertical prefabricated components.
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申请号:201811110508.1 公开号:CN110935052A 主分类号:A61L2/26
摘要:【中文】本发明公开了一种用于消毒柜的排汽装置,包括排汽风机,排汽风机的进汽口与消毒柜内部连通;排汽风机的排汽口处对应扣合有一排汽部,所述排汽部上设置有多个排汽孔,令消毒柜内的汽体经排汽风机和排汽部上的排汽孔排出柜外;本发明还提供了一种消毒柜的控制方法,当消毒柜的工作时长满足触发条件、或者是消毒柜内的当前湿度值满足触发条件,则消毒柜内的排汽装置开始工作。本发明通过设置排汽装置,能够有效的将消毒柜内的汽体排出,通过采用控制方法控制消毒柜内排汽装置的开闭,在将消毒柜内的汽体排出柜外的同时、保证消毒柜的消毒效果。 【EN】The invention discloses a steam exhaust device for a disinfection cabinet, which comprises a steam exhaust fan, wherein a steam inlet of the steam exhaust fan is communicated with the inside of the disinfection cabinet; a steam exhaust part is correspondingly buckled at the steam exhaust opening of the steam exhaust fan, a plurality of steam exhaust holes are arranged on the steam exhaust part, and steam in the disinfection cabinet is exhausted out of the cabinet through the steam exhaust fan and the steam exhaust holes on the steam exhaust part; the invention also provides a control method of the disinfection cabinet, when the working time of the disinfection cabinet meets the triggering condition, or the current humidity value in the disinfection cabinet meets the triggering condition, the steam exhaust device in the disinfection cabinet starts to work. The steam exhaust device is arranged, so that steam in the disinfection cabinet can be effectively exhausted, and the steam in the disinfection cabinet is exhausted out of the cabinet and the disinfection effect of the disinfection cabinet is ensured by controlling the opening and closing of the steam exhaust device in the disinfection cabinet by adopting a control method.
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申请号:202411208179.X 公开号:CN118713077A 主分类号:H02J3/00
摘要:一种考虑电动汽车换电需求和电网承载力的换电站布局方法,属于电力系统换电站优化布局领域,解决电动汽车充换电站随机性强、约束条件复杂而导致的换电站布局不合理问题;本发明利用蒙特卡洛模拟方法预测电动汽车的充电负荷,使充电负荷模型能够反映出电动汽车接入换电站的不确定性,更符合真实情况以配电网变压器和线路的容载比最小、配电网损耗最小和配电网电压偏移最小为目标,建立电动汽车混合充换电站最优规划的多目标模型;利用采用粒子群算法对多目标模型进行求解;综合考虑电动汽车随机负荷特性的模型,从而能够描述电动汽车接入后负荷的随机性,根据电网承载力对换电站布局进行优化,能更全面、准确地反映电网的状态。
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