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丁柏松【EN】Li Hui
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[发明]
【中文】一种碳化硅长晶炉电磁线圈定位方法 【EN】Method for positioning electromagnetic coil of silicon carbide crystal growth furnace
申请号:
201911353413.7
公开号:CN110965130A 主分类号:C30B35/00
申请人:
【中文】南京晶升能源设备有限公司【EN】NANJING CRYSTAL GROWTH & ENERGY EQUIPMENT Co.,Ltd.
申请日:2019.12.25 公开日:2020.04.07
发明人:
【中文】李辉
;
于君波
;
丁柏松【EN】Li Hui
;
Yu Junbo
;
Ding Baisong
摘要:【中文】本发明公开了一种碳化硅长晶炉电磁线圈定位方法,提供固定架、工装固定板、定心卡盘、承载线圈的圆环形的线圈定位板、承载线圈定位板的若干线圈定位柱;将下腔室装在固定架上,将工装固定板通过下腔室顶部的圆形凹槽实现定位,再安装线圈定位柱、线圈定位板及线圈,通过定心卡盘锁紧基准柱并使三根基准柱到下腔室中心的距离一致,这时通过测量基准柱与线圈的距离调整线圈的位置,使线圈内壁到任一基准柱的距离相等使线圈中心与下腔室中心重合,即线圈与热场同心,即在线圈调整到与热场同心位置后将线圈拆卸掉安装石英管后通过本发明可精确找到同心位置。 【EN】The invention discloses a method for positioning an electromagnetic coil of a silicon carbide crystal growth furnace, which comprises the steps of providing a fixing frame, a tool fixing plate, a centering chuck, an annular coil positioning plate for bearing a coil and a plurality of coil positioning columns for bearing the coil positioning plate; the lower cavity is arranged on a fixing frame, the fixture fixing plate is positioned through a circular groove in the top of the lower cavity, then a coil positioning column, a coil positioning plate and a coil are installed, the reference columns are locked through a centering chuck, the distances from the three reference columns to the center of the lower cavity are consistent, the position of the coil is adjusted by measuring the distance between the reference columns and the coil, the distance between the inner wall of the coil and any one reference column is equal, the center of the coil is coincided with the center of the lower cavity, namely the coil is concentric with a thermal field, and the concentric position can be accurately found through the method after the coil is adjusted to be concentric with the thermal field and then the quartz tube is detached from the coil.
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