摘要：【中文】本发明公开了一种介质阻挡放电串联微波放电的等离子体发生装置，包括放电管、高压电源、两个介质阻挡电极、微波源、微波腔体组成，所述电管由两个不同外径的放电管组成，用于将介质阻挡放电和微波放电串联在一起。气体通入介质阻挡放电管，在与高压电源相连接的两个相邻电极间形成长度足够到达微波腔体的介质阻挡等离子体射流，其产生的低电离能的激发态粒子到达微波腔体后可以促进微波放电产生微波等离子体，进而形成串联放电。本发明充分利用介质阻挡放电中发生的潘宁和光激发过程，不仅可以降低微波放电中工作气体的击穿功率和等离子体所需的维持功率，还可改善放电动力学，从而最大限度的提高能量利用率。 【EN】The invention discloses a plasma generating device with dielectric barrier discharge and microwave discharge connected in series, which comprises discharge tubes, a high-voltage power supply, two dielectric barrier electrodes, a microwave source and a microwave cavity, wherein the discharge tubes consist of two discharge tubes with different outer diameters and are used for connecting the dielectric barrier discharge and the microwave discharge in series. The gas is introduced into the dielectric barrier discharge tube, dielectric barrier plasma jet flow with the length enough to reach the microwave cavity is formed between two adjacent electrodes connected with the high-voltage power supply, and excited state particles with low ionization energy generated by the dielectric barrier plasma jet flow can promote microwave discharge to generate microwave plasma after reaching the microwave cavity, so that series discharge is formed. The invention makes full use of penning and light excitation processes generated in dielectric barrier discharge, not only can reduce the breakdown power of working gas and the maintenance power required by plasma in microwave discharge, but also can improve discharge dynamics, thereby improving the energy utilization rate to the maximum extent.