摘要：【中文】本发明涉及一种在三维存储器件的沟道孔中形成外延结构的方法，包括以下步骤：提供半导体结构，所述半导体结构包括核心区和辅助区；使用针对所述核心区的第一光刻步骤在所述核心区形成沟道孔；在所述沟道孔的底部形成外延结构；以及使用针对所述辅助区的第二光刻步骤在所述辅助区中形成虚拟孔。本发明仅在核心区的沟道孔内形成外延结构，而在辅助区的虚拟孔和/或沟槽中不形成外延结构，能够解决形成外延结构带来的漏电以及可靠性风险，同时简化了工艺难度。 【EN】The invention relates to a method for forming an epitaxial structure in a channel hole of a three-dimensional memory device, which comprises the following steps: providing a semiconductor structure, wherein the semiconductor structure comprises a core region and an auxiliary region; forming a channel hole in the core region using a first photolithography step for the core region; forming an epitaxial structure at the bottom of the channel hole; and forming a virtual hole in the auxiliary region using a second lithography step for the auxiliary region. According to the invention, the epitaxial structure is only formed in the channel hole of the core region, and the epitaxial structure is not formed in the virtual hole and/or the groove of the auxiliary region, so that the electric leakage and reliability risks caused by the formation of the epitaxial structure can be solved, and the process difficulty is simplified.

摘要：【中文】本发明公开了一种机械加速式的机车增黏撒砂装置，包括砂箱、砂箱下端与漏斗连接处设置有流量控制阀；还包括用于对砂子颗粒进行加速的加速装置；漏斗下端通过软管连接到加速装置的进砂口；加速装置包括叶轮和设置在叶轮中心的分砂轮；分砂轮外设置有定向套；还包括均匀设置到叶轮上的多个叶片定向套上设置有多个通孔，通孔对应相邻两叶片之间位置；加速装置下端设置有出砂口，出砂口连接喷嘴；还包括用于带动叶轮转动的第一电机；本发明通过高速旋转叶轮将增黏颗粒加速喷出，相对于压力式和重力式撒砂装置，可以达到更高的撒砂速度；可有效避免机车高速行驶过程中的气流干扰，提高颗粒喷射效率。 【EN】The invention discloses a mechanical acceleration type locomotive tackifying and sanding device which comprises a sand box, wherein a flow control valve is arranged at the joint of the lower end of the sand box and a funnel; the sand-removing device also comprises an accelerating device for accelerating the sand particles; the lower end of the hopper is connected to a sand inlet of the accelerating device through a hose; the accelerating device comprises an impeller and a sub-grinding wheel arranged in the center of the impeller; a directional sleeve is arranged outside the sand separating wheel; the impeller is characterized in that a plurality of through holes are uniformly arranged on a plurality of blade directional sleeves on the impeller, and the through holes correspond to the positions between two adjacent blades; the lower end of the accelerating device is provided with a sand outlet which is connected with a nozzle; the first motor is used for driving the impeller to rotate; the invention accelerates the ejection of the tackifying particles by rotating the impeller at a high speed, and can achieve higher sanding speed compared with pressure type and gravity type sanding devices; the air flow interference in the process of high-speed running of the locomotive can be effectively avoided, and the particle spraying efficiency is improved.