摘要：【中文】本发明公开一种直流磁控溅射制备耐腐蚀纯钛薄膜的方法，包括基底表面处理、基底放置镀膜腔室、反向沉积清理基底表面、溅射镀膜以及取出镀膜基底制得成品等步骤，可针对阀门、反应釜等产品，采用合理的表面处理、工装固定及溅射镀膜工艺，在其表面上负载纯钛薄膜，使其满足质量和耐腐蚀要求，且工艺流程简单、效率高，过程可控，无环境污染，易于实现工业化生产。 【EN】The invention discloses a method for preparing a corrosion-resistant pure titanium film by direct-current magnetron sputtering, which comprises the steps of substrate surface treatment, substrate placing of a coating chamber, reverse deposition cleaning of the substrate surface, sputtering coating, taking out of the coated substrate to prepare a finished product and the like.