摘要：【中文】本发明公开了一种新型5寸掩模版贴膜工具，包括中央镂空的主体支架、定位兼导向块和压力杆，定位兼导向块分布于中央镂空的主体支架的四周，压力杆设置在主体支架四角上；所述压力杆分别与5寸掩模版四个角位置对应。主体支架的中央镂处可以观察贴膜工具的4个压力杆和5寸掩模版四个角位置是否对应。本发明设计科学合理，操作简单方便，本发明解决了人工使用四根手指来按压掩模基板，取而代之地使用四根压力杆可以在掩模基板四角压力均匀，且不会因手指按压留下痕迹。 【EN】The invention discloses a novel 5-inch mask pasting tool, which comprises a main body support with a hollow center, positioning and guiding blocks and pressure rods, wherein the positioning and guiding blocks are distributed around the main body support with the hollow center, and the pressure rods are arranged at four corners of the main body support; the pressure rods correspond to four angular positions of the 5-inch mask respectively. The central hollow-out position of the main body support can be used for observing whether four angular positions of 4 pressure rods of the film sticking tool correspond to four angular positions of a 5-inch mask. The mask substrate pressing device is scientific and reasonable in design and simple and convenient to operate, and solves the problem that four fingers are used for manually pressing the mask substrate, four pressure rods are used instead, pressure can be uniformly applied to four corners of the mask substrate, and traces cannot be left due to finger pressing.

摘要：【中文】本发明公开了一种去除掩模保护膜上颗粒的方法，包括以下步骤：S1、找到掩模保护膜上的颗粒位置；S2、将异丙醇或无水乙醇滴加到颗粒位置处；S3、异丙醇或无水乙醇水滴在颗粒处来回滚动，吸附并包裹在保护膜表面的颗粒与保护膜分离；S4、用无尘布将异丙醇或无水乙醇水滴吸干。本发明提供的去除掩模保护膜上颗粒的方法，采用异丙醇或无水乙醇水滴的滚动把吸附性很强的灰尘颗粒去除，代替氮气枪吹扫，避免由于氮气压力过大而损伤保护膜的透光率，步骤简单、方便实用，减少由于颗粒去除不掉带来的拆膜、清洗、检测、安装保护膜等生产工序，缩短生产周期，节约生产成本。 【EN】The invention discloses a method for removing particles on a mask protective film, which comprises the following steps: s1, finding the positions of the particles on the mask protective film; s2, dropwise adding isopropanol or absolute ethyl alcohol to the position of the particles; s3, enabling water drops of isopropanol or absolute ethyl alcohol to roll back and forth at the particles, and separating the particles adsorbed and coated on the surface of the protective film from the protective film; s4, sucking the water drops of the isopropanol or the absolute ethyl alcohol by using a dust-free cloth. According to the method for removing the particles on the mask protection film, provided by the invention, the dust particles with strong adsorbability are removed by rolling of isopropanol or absolute ethyl alcohol water drops to replace a nitrogen gun for blowing, so that the light transmittance of the protection film is prevented from being damaged due to overlarge nitrogen pressure, the steps are simple, convenient and practical, the production processes of film detachment, cleaning, detection, protection film installation and the like caused by the fact that the particles cannot be removed are reduced, the production period is shortened, and the production cost is saved.

摘要：【中文】本发明公开了一种掩模工艺用多层上料盒，包括掩模工艺用上料盒盒体，所述掩模工艺用上料盒盒体的前表面设置有盒体挡片，且所述掩模工艺用上料盒盒体的内侧分别开设有两个下掩膜版放置腔和两个上掩膜版放置腔，每个所述下掩膜版放置腔均位于上掩膜版放置腔的正下方。本发明在掩模工艺用上料盒盒体的内侧开设有两个下掩膜版放置腔和两个上掩膜版放置腔，不仅能放置两种不同型号的版，而且能够同时放置多片掩模版，简单实用，安全可靠。 【EN】The invention discloses a multilayer feeding box for a mask process, which comprises a feeding box body for the mask process, wherein a box body blocking piece is arranged on the front surface of the feeding box body for the mask process, two lower mask placing cavities and two upper mask placing cavities are respectively formed in the inner side of the feeding box body for the mask process, and each lower mask placing cavity is positioned right below the upper mask placing cavity. The inner side of the upper material box body for the mask process is provided with the two lower mask plate placing cavities and the two upper mask plate placing cavities, so that not only can two different types of plates be placed, but also a plurality of mask plates can be placed at the same time, and the mask process box is simple, practical, safe and reliable.