摘要：【中文】一种近场微波显微镜介电常数测量标定的软接触实现方法，属于近场微波显微镜的测试领域。采用至少3个已知介电常数的样品进行软接触测试，得到各样品在软接触时的谐振频率，然后通过拟合的方式得到常数A与f₀，完成近场微波显微镜介电常数测量时的标定。本发明方法操作简单，误差较小，有效减小了针尖样品距离对介电常数测量的影响，很好地实现了利用近场微波显微镜测量介电常数时的标定。 【EN】A soft contact realization method for measuring and calibrating the dielectric constant of a near-field microwave microscope belongs to the field of testing of near-field microwave microscopes. Soft contact test is carried out by adopting at least 3 samples with known dielectric constants to obtain the resonant frequency of each sample in soft contact, and then constants A and f are obtained by a fitting mode₀And completing the calibration during the measurement of the dielectric constant of the near-field microwave microscope. The method has the advantages of simple operation and small error, effectively reduces the influence of the distance of the needle point sample on the dielectric constant measurement, and well realizes the calibration when the dielectric constant is measured by using the near-field microwave microscope.