摘要：【中文】一种射频(RF)匹配电路控制系统包括：包括多个可调谐部件的RF匹配电路。所述RF匹配电路被配置为从RF发生器接收输入信号，所述输入信号包括至少两种脉冲电平；根据所述输入信号向负载提供输出信号；以及使与所述输入信号相关联的阻抗与所述负载的阻抗匹配。控制器被配置为针对所述输入信号的所述至少两种脉冲电平确定所述负载的相应的阻抗；并且调节所述多个可调谐部件的操作参数，以针对所述至少两种脉冲电平使所述RF匹配电路的频率调谐范围与所述负载的所述相应的阻抗对准，从而使与所述输入信号相关联的所述阻抗与所述相应的阻抗匹配。 【EN】A Radio Frequency (RF) matching circuit control system comprising: an RF matching circuit comprising a plurality of tunable components. The RF matching circuit is configured to receive an input signal from an RF generator, the input signal including at least two pulse levels; providing an output signal to a load in accordance with the input signal; and matching an impedance associated with the input signal to an impedance of the load. The controller is configured to determine respective impedances of the load for the at least two pulse levels of the input signal; and adjusting operating parameters of the plurality of tunable components to align a frequency tuning range of the RF matching circuit with the respective impedance of the load for the at least two pulse levels to match the impedance associated with the input signal to the respective impedance.