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Ben Jianwei
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1:
[发明]
【中文】一种降低GaN衬底与外延层界面处Si浓度的方法 【EN】Method for reducing Si concentration at interface of GaN substrate and epitaxial layer
申请号:
201911117597.7
公开号:CN111180311A 主分类号:H01L21/02
申请人:
【中文】深圳第三代半导体研究院【EN】SHENZHEN THIRD GENERATION SEMICONDUCTOR Research Institute
申请日:2019.11.15 公开日:2020.05.19
发明人:
【中文】刘新科
;
贲建伟【EN】Liu Xinke
;
Ben Jianwei
摘要:【中文】本发明提供一种降低GaN衬底与外延层界面处Si浓度的方法,包括S1.选取GaN同质衬底,对GaN衬底进行预处理以露出原子台阶形貌;S2.在外延系统中外延生长GaN基材料;S3.在不低于500℃下,持续通入保护气体对所述GaN基材料进行热处理以增大界面处原子扩散驱动力,利用该方法可有效降低GaN衬底与外延层界面处Si杂质浓度,降低基于此方法所制备器件的漏电流,有利于提升所制备器件性能。 【EN】The invention provides a method for reducing Si concentration at an interface of a GaN substrate and an epitaxial layer, which comprises the steps of S1, selecting a GaN homogeneous substrate, and pretreating the GaN substrate to expose the atomic step appearance; s2, epitaxially growing a GaN-based material in an epitaxial system; and S3, continuously introducing protective gas at the temperature of not less than 500 ℃ to carry out heat treatment on the GaN-based material so as to increase the atomic diffusion driving force at the interface, wherein the method can effectively reduce the Si impurity concentration at the interface between the GaN substrate and the epitaxial layer, reduce the leakage current of the device prepared based on the method, and is beneficial to improving the performance of the prepared device.
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2:
[发明]
【中文】一种蓝光/红光双色LED芯片封装结构及制备方法 【EN】Blue light/red light double-color LED chip packaging structure and preparation method
申请号:
202010075461.0
公开号:CN111261764A 主分类号:H01L33/50
申请人:
【中文】深圳大学【EN】SHENZHEN University
申请日:2020.01.22 公开日:2020.06.09
发明人:
【中文】刘新科
;
罗江流
;
贲建伟
;
贺威【EN】Liu Xinke
;
Luo Jiangliu
;
Ben Jianwei
;
He Wei
摘要:【中文】本发明公开了一种蓝光/红光双色LED芯片封装结构及制备方法,其中封装结构包括:衬底;LED外延片,生成于所述衬底的表面;MoS
2
发光涂层,沉积于所述LED外延片表面或LED发光窗口上,所述MoS
2
发光涂层用于将蓝光转换成红光。本发明在LED外延片表面或LED发光窗口上沉积MoS
2
发光涂层,利用MoS
2
发光涂层将部分LED外延片发出的蓝光转换为红光,由于MoS
2
材料特定的禁带宽度以及良好的透光性,极大的降低了光子在吸收转换过程中的损失,使器件发光全部处于植物高效吸收范围内,节省能源。 【EN】The invention discloses a blue light/red light double-color LED chip packaging structure and a preparation method thereof, wherein the packaging structure comprises: a substrate; the LED epitaxial wafer is generated on the surface of the substrate; MoS
2
A luminous coating deposited on the surface of the LED epitaxial wafer or the LED luminous window, the MoS
2
The luminescent coating is used to convert blue light into red light. The invention deposits MoS on the surface of the LED epitaxial wafer or the LED light-emitting window
2
Luminescent coating using MoS
2
The luminescent coating converts part of blue light emitted by the LED epitaxial wafer into red light due to MoS
2
The specific forbidden band width and the good light transmission of the material greatly reduce the loss of photons in the absorption and conversion process, so that the light emitted by the device is totally in the efficient absorption range of plants, and the energy is saved.
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3:
[发明]
【中文】AlGaN基同质集成光电子芯片及其制备方法 【EN】AlGaN-based homogeneous integrated optoelectronic chip and preparation method thereof
申请号:
201911273385.8
公开号:CN110993737A 主分类号:H01L31/18
申请人:
【中文】中国科学院长春光学精密机械与物理研究所【EN】Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences
申请日:2019.12.12 公开日:2020.04.10
发明人:
【中文】黎大兵
;
贲建伟
;
孙晓娟
;
蒋科
;
石芝铭
;
贾玉萍【EN】Li Dabing
;
Ben Jianwei
;
Sun Xiaojuan
;
Jiang Ke
;
Shi Zhiming
;
Jia Yuping
摘要:【中文】本发明提供一种AlGaN基同质集成光电子芯片的制备方法,包括:选择C面具有斜切角的图形化衬底,所述斜切角的角度大于0.1°且小于90°;在图形化衬底上外延生长AlN模板;在AlN模板上生长AlGaN基器件结构;对图形化衬底上外延生长的AlGaN材料翼区以及台面区进行定位;在相应区域制备光探测器件、发光器件以及光波导结构,得到AlGaN基同质集成光电子芯片。上述方法可以提高电子芯片的工作效率。 【EN】The invention provides a preparation method of an AlGaN-based homogeneous integrated optoelectronic chip, which comprises the following steps: selecting a patterned substrate having a chamfered angle on the C-side, the chamfered angle having an angle greater than 0.1 ° and less than 90 °; epitaxially growing an AlN template on the patterned substrate; growing an AlGaN-based device structure on the AlN template; positioning an AlGaN material wing area and a mesa area which are epitaxially grown on a patterned substrate; and preparing a light detection device, a light emitting device and an optical waveguide structure in the corresponding region to obtain the AlGaN-based homogeneous integrated optoelectronic chip. The method can improve the working efficiency of the electronic chip.
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4:
[发明]
【中文】一种适应于空间核热推进系统的热控装置 【EN】Thermal control device suitable for space nuclear thermal propulsion system
申请号:
201911056682.7
公开号:CN110963084A 主分类号:B64G1/40
申请人:
【中文】中国运载火箭技术研究院【EN】CHINA ACADEMY OF LAUNCH VEHICLE TECHNOLOGY
申请日:2019.10.31 公开日:2020.04.07
发明人:
【中文】吕建伟
;
刘欣
;
王领华
;
王思峰
;
余群
;
潘瑶
;
巩萌萌
;
周振君
;
张少华
;
王海英
;
贲勋【EN】Lv Jianwei
;
Liu Xin
;
Wang Linghua
;
Wang Sifeng
;
Yu Qun
;
Pan Yao
;
Gong Mengmeng
;
Zhou Zhenjun
;
Zhang Shaohua
;
Wang Haiying
;
Ben Xun
摘要:【中文】一种适应于空间核热推进系统的热控装置,包括低温绝热防护结构、低温贮氢罐、第一换热器、空间发电模块、辐射散热器和低温制冷机。低温绝热防护结构包覆于低温贮氢罐外围;低温贮氢罐内的工质氢一路直接进入核热反应堆,另一路对核热发动机喷管冷却后再进入核热反应堆;核热反应堆堆芯内的热量传递给第一换热器;第一换热器将堆芯余热传入空间发电模块;空间发电模块利用一部分热量进行发电,剩余热量传输给辐射散热器进行空间辐射散热;空间发电模块发电的电能控制低温制冷机制冷,保证低温贮氢罐内工质维持低温贮存状态。本发明既具有可靠性高(无运动部件)、传热散热效果好的优点,又具有结构简单、综合热管理的特点,具有极大的应用前景。 【EN】A thermal control device suitable for a space nuclear thermal propulsion system comprises a low-temperature heat insulation protection structure, a low-temperature hydrogen storage tank, a first heat exchanger, a space power generation module, a radiation radiator and a low-temperature refrigerator. The low-temperature heat-insulation protection structure is coated on the periphery of the low-temperature hydrogen storage tank; one path of working medium hydrogen in the low-temperature hydrogen storage tank directly enters the nuclear heat reactor, and the other path of working medium hydrogen cools a spray pipe of a nuclear heat engine and then enters the nuclear heat reactor; transferring heat in the core of the nuclear thermal reactor to a first heat exchanger; the first heat exchanger transmits the waste heat of the reactor core into the space power generation module; the space power generation module generates power by using a part of heat, and the rest heat is transmitted to the radiation radiator for space radiation heat dissipation; the electric energy generated by the space power generation module controls the low-temperature refrigerator to refrigerate, and the working medium in the low-temperature hydrogen storage tank is ensured to maintain a low-temperature storage state. The invention has the advantages of high reliability (no moving parts) and good heat transfer and dissipation effects, has the characteristics of simple structure and comprehensive heat management, and has great application prospect.
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