摘要：【中文】一种低横向灵敏度的法布里珀罗光学MEMS加速度传感器，包括基座，基座的上面和传感器壳体连接形成腔室，腔室内的基座上连接半导体制冷片，半导体制冷片的上方连接有第二支架，第二支架的内部连接有激光二极管，半导体制冷片上表面与激光二极管粘接，第二支架的上方连接有敏感芯片，敏感芯片的上方连接有第一支架，第一支架的上方连接有光电检测芯片及其电路板；敏感芯片为MEMS法布里珀罗光学弹簧质量结构，由可动镜面、腔体、固定镜面形成法布里珀罗腔；本发明采用法布里珀罗干涉光学加速度检测方式，结合闭环温度控制系统，具有高分辨率和灵敏度；敏感芯片采用分体式弹簧质量结构，有效隔绝横向加速度，降低了传感器的横向灵敏度。 【EN】A Fabry-Perot optical MEMS acceleration sensor with low lateral sensitivity comprises a base, wherein the upper surface of the base is connected with a sensor shell to form a cavity, a semiconductor refrigerating sheet is connected onto the base in the cavity, a second support is connected above the semiconductor refrigerating sheet, a laser diode is connected inside the second support, the upper surface of the semiconductor refrigerating sheet is bonded with the laser diode, a sensitive chip is connected above the second support, a first support is connected above the sensitive chip, and a photoelectric detection chip and a circuit board thereof are connected above the first support; the sensitive chip is an MEMS Fabry-Perot optical spring mass structure, and a Fabry-Perot cavity is formed by a movable mirror surface, a cavity body and a fixed mirror surface; the invention adopts a Fabry-Perot interference optical acceleration detection mode, combines a closed-loop temperature control system, and has high resolution and sensitivity; the sensitive chip adopts a split spring mass structure, so that the transverse acceleration is effectively isolated, and the transverse sensitivity of the sensor is reduced.

摘要：【中文】本发明公开了一种基于单向电同步的超谐同步谐振式加速度计，MEMS谐振式加速度计的两个谐振传感模块对称设置在质量块模块的两侧，分别通过杠杆机构模块与质量块模块连接，MEMS谐振式加速度计将振动信号以电信号的形式引入至外部高频振荡器中并形成超谐同步。在同步带宽内，高频谐振器呈倍数地放大MEMS谐振式加速度计的频率偏移量。本发明解决了耦合振荡器之间的相互作用导致的标度因子下降的问题，充分发挥超谐同步效应对整机性能提升的优势。同时，当两个振荡器出现同步现象时，敏感梁振荡回路的噪声将得到大幅抑制，频率稳定性将得到大幅提升。从提升灵敏度、改善分辨率、降低噪声等多个方面同时优化谐振式加速度计的性能指标。 【EN】The invention discloses a super-harmonic synchronous resonant accelerometer based on unidirectional electrical synchronization. Within the synchronous bandwidth, the high-frequency resonator multiplies the frequency offset of the MEMS resonant accelerometer. The invention solves the problem of scale factor reduction caused by interaction between coupled oscillators, and fully exerts the advantage of improving the whole machine performance by the super-harmonic synchronization effect. Meanwhile, when the two oscillators are synchronous, the noise of the sensitive beam oscillation loop is greatly suppressed, and the frequency stability is greatly improved. The performance indexes of the resonant accelerometer are optimized simultaneously from the aspects of improving the sensitivity, improving the resolution, reducing the noise and the like.

摘要：【中文】本发明公开了一种基于MEMS超谐同步加速度计的频率自动跟踪方法及系统，频率计数器间隔一定周期采集频率点数并进行数据处理，去除跳跃点并求取平均值可获得振荡回路1，振荡回路2的频率均值；对频率均值进行频率差值比较；对频率差值进行阈值判定，判断是否需要执行频率补偿操作；对频率差值进行零点判定，判断所需执行的正、负补偿；根据结果，对同步梁振荡器执行正补偿或负补偿，通过控制高阶同步模块的频率实现MEMS超谐同步带宽的扩大。本发明首次提出频率自动跟踪技术，结合硅基谐振器中存在的焦耳热效应和幅值‑频率效应建立完整的算法体系进行频率补偿，大幅提升同步加速度计的整体性能。 【EN】The invention discloses a frequency automatic tracking method and a frequency automatic tracking system based on an MEMS super-harmonic synchronous accelerometer.A frequency counter collects frequency points at intervals of a certain period and processes data, jumping points are removed, and the average value is obtained to obtain the frequency average value of an oscillation circuit 1 and an oscillation circuit 2; comparing the frequency difference values of the frequency mean values; judging a threshold value of the frequency difference value, and judging whether frequency compensation operation needs to be executed or not; carrying out zero judgment on the frequency difference value, and judging positive compensation and negative compensation to be executed; and according to the result, executing positive compensation or negative compensation on the synchronous beam oscillator, and realizing the expansion of the super-harmonic synchronous bandwidth of the MEMS by controlling the frequency of the high-order synchronous module. The invention firstly provides a frequency automatic tracking technology, and establishes a complete algorithm system for frequency compensation by combining the Joule heating effect and the amplitude-frequency effect existing in the silicon-based resonator, thereby greatly improving the overall performance of the synchronous accelerometer.

摘要：【中文】本发明公开了一种温度自补偿的面内双轴加速度传感器及温度补偿方法，包括质量块，质量块的周围呈中心对称均匀布置有多组谐振敏感元件，当面内任意方向、任意大小的加速度施加于器件时，质量块同时对多组谐振敏感元件施加应力，改变其本征频率，谐振频率分别由对应的实时频率读取电路读出。本发明相比于传统的差分式单轴加速度传感器，在测量精度、灵敏度、测试量程等方面都具有独特的优势。本发明提供的温度补偿方法，除了消除温度带来的系统误差之外，还可额外提供当前的温度值信息。 【EN】The invention discloses a temperature self-compensating in-plane biaxial acceleration sensor and a temperature compensation method, wherein the temperature self-compensating in-plane biaxial acceleration sensor comprises a mass block, a plurality of groups of resonance sensitive elements are arranged around the mass block in a central symmetry manner, when acceleration in any direction and any magnitude in a plane is applied to a device, the mass block applies stress to the plurality of groups of resonance sensitive elements simultaneously to change the eigenfrequency of the resonance sensitive elements, and the resonance frequency is read by corresponding real-time frequency reading circuits respectively. Compared with the traditional differential uniaxial acceleration sensor, the differential uniaxial acceleration sensor has unique advantages in the aspects of measurement precision, sensitivity, test range and the like. The temperature compensation method provided by the invention can be used for eliminating the system error caused by the temperature and additionally providing the current temperature value information.

摘要：【中文】本发明公开了基于数控运动平台的涡旋盘测量方法及装置，包括主机底座、回转平台、翻转夹持部件、两极光栅扫描双球测头部件、径向轴、垂直轴、切向轴运动机构组成。该测头部件采用两极光栅扫描双球测头结构。该测头部件配合四轴运动平台及翻转夹持部件实现汽车空调涡旋压缩机涡旋盘关键形位尺寸的快速高效且精确的在线测量，该装置可有效避免测量过程中干涉的发生，工件通过一次装夹，建立起涡旋盘工件的坐标基准，检测软件通过采用改进的基于极坐标的极半径误差数学模型完成涡旋盘内外旋线的轮廓度等关键测量项目的快速分析。该设备可用于涡旋盘生产线上形位误差的快速检测，检测结果直接反应加工误差，可及时控制加工精度。 【EN】The invention discloses a vortex disc measuring method and device based on a numerical control motion platform. The measuring head part adopts a two-pole raster scanning double-ball measuring head structure. This gauge head part cooperation four-axis motion platform and upset centre gripping part realize quick high-efficient and accurate on-line measurement of vehicle air conditioner scroll compressor vortex dish key shape position size, and the device can effectively avoid the emergence of interfering in the measurement process, and the work piece is through a clamping, has established the coordinate benchmark of vortex dish work piece, and detection software accomplishes the rapid analysis of key measurement items such as profile tolerance of the interior despinner of vortex dish through adopting the modified utmost point radius error mathematical model based on polar coordinates. The equipment can be used for rapidly detecting the form and position errors on a vortex plate production line, the detection result directly reflects the machining errors, and the machining precision can be controlled in time.

摘要：【中文】一种超高强度聚甲醛纤维的制备方法，先将纺丝原液转移到挤出机中，通过喷丝孔将纺丝原液挤出；挤出物在凝固浴中冷却形成凝胶纤维，然后将凝胶纤维收集到卷轴上，将缠有凝胶纤维的卷轴置于纺丝溶剂/水溶液中；再将卷轴上的凝胶纤维缠绕在收集器上，保持张力；然后将收集器上的凝胶纤维浸入水浴中，将纺丝溶剂萃取出来；最后，将去除纺丝溶剂后获得的前驱体纤维,即缠绕在收集器上的完成萃取的凝胶纤维在对流空气中干燥，随后对前驱体纤维进行热拉伸，得到超高强度聚甲醛纤维；本发明制备的聚甲醛纤维具有高强度和高模量。 【EN】A preparation method of an ultrahigh-strength polyformaldehyde fiber comprises the steps of transferring a spinning stock solution into an extruder, and extruding the spinning stock solution through a spinneret orifice; cooling the extrudate in a coagulating bath to form gel fibers, collecting the gel fibers on a reel, and placing the reel wound with the gel fibers in a spinning solvent/water solution; winding the gel fiber on the reel on a collector to keep tension; then soaking the gel fiber on the collector into water bath to extract spinning solvent; finally, drying the precursor fiber obtained after the spinning solvent is removed, namely the gel fiber wound on a collector and subjected to extraction in convection air, and then carrying out thermal stretching on the precursor fiber to obtain the ultrahigh-strength polyformaldehyde fiber; the polyformaldehyde fiber prepared by the method has high strength and high modulus.

摘要：【中文】本发明公开了一种光纤探针传感器，采用前端为锥形结构的光纤作为多参量测量传感器，在光纤的锥形结构侧壁设置沿光纤径向设置的开口槽，开口槽与光纤纤芯连通，在开口槽下表面涂覆有待检测参量敏感材料层，利用不同敏感材料层反射率的变化形成不同光谱图实现环境中温度和有害气体的检测，本发明光纤探针体积小、质量小、抗电磁干扰、具有柔性化特点，其响应时间短、灵敏度高，可通过大量分布，应用于应急事故、检漏和巡视，可以很容易判断泄漏点的方位，大大提高工作效率。光纤的锥形结构侧壁沿光纤轴线方向设有多个开口槽，各开口槽下表面涂覆的待检测参量敏感材料层不同，采用一根光纤可同时实现多种不同参量的测量，大大提高了测量效率。 【EN】The invention discloses an optical fiber probe sensor, which adopts an optical fiber with a conical structure at the front end as a multi-parameter measuring sensor, wherein an open slot arranged along the radial direction of the optical fiber is arranged on the side wall of the conical structure of the optical fiber, the open slot is communicated with the fiber core of the optical fiber, a parameter sensitive material layer to be detected is coated on the lower surface of the open slot, and different spectrograms are formed by utilizing the change of the reflectivity of different sensitive material layers to realize the detection of temperature and harmful gas in the environment. The tapered structure side wall of the optical fiber is provided with a plurality of open grooves along the axial direction of the optical fiber, the lower surfaces of the open grooves are coated with different to-be-detected parameter sensitive material layers, and the optical fiber can be used for simultaneously measuring various different parameters, so that the measuring efficiency is greatly improved.

摘要：【中文】本发明公开了一种基于曲率变化的叶片缘头截面型线自适应分割方法，该方法结合叶型的形状特征，分为初始缘头范围的确定和基于曲率变化的精确分割两部分。本发明通过初步定位缩小搜索范围，在减小搜索数据量的基础上提高了算法的鲁棒性，再结合叶型的特征，通过曲率半径变化精确的分割出缘头，解决了由于叶盆、叶背型线为自由曲线而在计算二者的分割点(切点)时，无法获得解析解和由于叶片在加工制造中和检测时受到多种误差因素的影响，以及测量时采样率的限制所造成得叶型轮廓测量数据与理论模型产生偏差使精确分割缘头较为困难等问题。 【EN】The invention discloses a curvature change-based blade edge head section profile self-adaptive segmentation method which is divided into two parts, namely initial edge head range determination and curvature change-based accurate segmentation, by combining the shape characteristics of a blade profile. The invention reduces the search range through preliminary positioning, improves the robustness of the algorithm on the basis of reducing the search data quantity, precisely segments the margin head through the change of the curvature radius by combining the characteristics of the blade profile, and solves the problems that the margin head is difficult to precisely segment due to the deviation of the measured data of the blade profile and a theoretical model caused by the deviation of the measured data of the blade profile and the theoretical model in the process of processing, manufacturing and detection because the blade basin and the blade back profile are free curves and the segmentation points (tangent points) of the blade basin and the blade back profile are calculated.

摘要：【中文】本发明公开了一种基于叶片型面测量点云的叶型提取方法。首先，本发明研究了提高型面重建质量和速度的前处理方法，包括分割、统计学滤波、基于八叉树结构的精简若干步骤。然后，研究了网格包络的型面重建方法，对固定高度叶型进行空间插值计算出精确的叶型数据。具体的，该方法采用基于距离统计的离群点滤波方法进行数据滤波，以及基于八叉树数据结构点云精简等技术对点云数据进行预处理，然后采用基于区域增长的重建算法结合Delaunay的准则实现叶片点云的快速重建，最后利用零件图纸规定高度的平面与拓扑网格相交，通过空间插值完成叶型数据的提取。本发明计算效率高，克服投影法的难以精确保留叶型特征的问题，有很好的工程应用前景。 【EN】The invention discloses a blade profile extraction method based on blade profile measurement point cloud. Firstly, the invention researches a pretreatment method for improving the quality and speed of profile reconstruction, and the pretreatment method comprises a plurality of steps of segmentation, statistical filtering and simplification based on an octree structure. Then, a profile reconstruction method of grid envelope is researched, and accurate leaf profile data are calculated by performing spatial interpolation on the leaf profile with fixed height. Specifically, the method comprises the steps of performing data filtering by using an outlier filtering method based on distance statistics, preprocessing point cloud data by using technologies such as octree data structure point cloud simplification and the like, then realizing rapid reconstruction of blade point cloud by using a reconstruction algorithm based on region growing and combining a Delaunay criterion, and finally completing extraction of blade type data by using a plane with a specified height of a part drawing to intersect with a topological grid and performing spatial interpolation. The method has high calculation efficiency, overcomes the problem that the leaf profile characteristics are difficult to accurately retain in the projection method, and has good engineering application prospect.

摘要：【中文】本发明公开了一种金属‑氧化物型薄膜热电偶及其制备方法，包括基底以及位于基底上的钨铼26薄膜区及氧化铟薄膜区，其中，钨铼26薄膜区与氧化铟薄膜区相接触，该热电偶具有耐高温及高热电输出能力的特点，且制备方法简单。 【EN】The invention discloses a metal-oxide type film thermocouple and a preparation method thereof, and the metal-oxide type film thermocouple comprises a substrate, a tungsten-rhenium 26 film area and an indium oxide film area which are positioned on the substrate, wherein the tungsten-rhenium 26 film area is contacted with the indium oxide film area, the thermocouple has the characteristics of high temperature resistance and high thermoelectric output capacity, and the preparation method is simple.