摘要：【中文】本发明公开了一种具有双层结构的无源器件及制作方法，其中制作方法包括如下步骤：在晶圆上制作电阻；涂布桥墩光阻，在待制作电感的桥墩处进行显影，待制作电感位于电阻的上方，桥墩处与电阻具有间隙；在桥墩处制作桥墩，桥墩用于支撑待制作电感；涂布桥面光阻，对待制作电感处进行显影，桥面光阻定义电感的形状；沉积金属，在待制作电感处形成电感；去除桥墩光阻和桥面光阻，电感以桥墩为支撑点位于电阻的上方。本发明以桥墩为支撑点将电感承载在电阻的上方，从而形成双层结构的无源器件，最多可节约50％的空间，缩小无源器件体积，利于集成化；其次无源器件体积的缩减可节约成本，提高利润率；再者空气的介电常数小，降低了电感处的寄生效应。 【EN】The invention discloses a passive device with a double-layer structure and a manufacturing method thereof, wherein the manufacturing method comprises the following steps: manufacturing a resistor on the wafer; coating a pier photoresist, and developing at the pier where the inductor is to be manufactured, wherein the inductor is positioned above the resistor, and a gap is formed between the pier and the resistor; manufacturing a pier at the pier, wherein the pier is used for supporting the inductor to be manufactured; coating a bridge surface light resistor, developing the inductor to be manufactured, and defining the shape of the inductor by the bridge surface light resistor; depositing metal, and forming an inductor at the position of the inductor to be manufactured; and removing the pier light resistance and the bridge surface light resistance, wherein the inductor is positioned above the resistor by taking the pier as a supporting point. According to the invention, the bridge pier is used as a supporting point to bear the inductor above the resistor, so that a passive device with a double-layer structure is formed, the space can be saved by 50% at most, the volume of the passive device is reduced, and the integration is facilitated; secondly, the volume of the passive device is reduced, so that the cost can be saved, and the profit rate can be improved; furthermore, the dielectric constant of the air is small, and the parasitic effect at the inductor is reduced.