摘要：【中文】基板处理方法具有：加工工序，自基板的与粘贴有保护带的第1主表面相反的一侧的第2主表面侧对所述基板进行加工；以及输送工序，将能够利用静电吸附力进行吸附的静电支承件安装于在加工工序中进行了加工的基板并进行输送。以将静电支承件安装于施加了加工后的基板的状态对其进行输送，因此，能够利用静电支承件针对基板的脆弱性进行加强，能够良好地防止输送时的基板的变形、破损。 【EN】The substrate processing method includes: a processing step of processing the substrate from a 2 nd main surface side of the substrate opposite to the 1 st main surface to which the protective tape is pasted; and a conveying step of mounting and conveying the electrostatic support member capable of being attracted by the electrostatic attraction force to the substrate processed in the processing step. Since the electrostatic support is transported in a state where it is attached to the processed substrate, the vulnerability of the substrate can be enhanced by the electrostatic support, and the substrate can be prevented from being deformed or damaged during transportation.

摘要：【中文】一种安装结构，包括壳体和安装到所述壳体的板状盖。所述盖具有锁定部，以将所述盖固定到所述壳体。所述壳体具有与所述锁定部接合的被锁定部，以限制所述盖在与所述壳体分离的方向上的运动。所述安装结构构造成在将所述盖安装在所述壳体上时，在接合位置处接合所述锁定部和所述被锁定部，同时所述盖和所述壳体在远离所述接合位置的按压位置处沿彼此分开的方向被彼此按压，并且构造成在所述按压位置和所述接合位置之间的区域中，在所述盖与所述壳体之间形成空间。 【EN】A mounting structure includes a housing and a plate-like cover mounted to the housing. The cover has a locking portion to fix the cover to the housing. The housing has a locked portion engaged with the locking portion to restrict movement of the cover in a direction separating from the housing. The mounting structure is configured to engage the locking portion and the locked portion at an engagement position while the cover and the housing are pressed against each other in a direction away from each other at a pressing position away from the engagement position when the cover is mounted on the housing, and is configured to form a space between the cover and the housing in an area between the pressing position and the engagement position.

摘要：【中文】本发明实施例提供了一种数据备份系统和方法以及电子设备。该系统包括：用于部署虚拟机的宿主机和用于提供云服务的云存储模块，所述宿主机中设置有控制模块，所述云存储模块中创建有本地盘的备份盘，所述本地盘为所述虚拟机在所述宿主机上使用的数据盘，所述控制模块用于，实时监控所述虚拟机对所述本地盘的写操作，当监控到所述写操作时，将所述本地盘中的数据备份到所述备份盘中。本发明实施例通过在云存储模块上创建本地盘的备份盘，以及在宿主机中设置控制模块，以实时监控虚拟机对本地盘的写操作，从而实现宿主机中本地盘数据的实时备份，提高本地盘数据的安全性，同时还能够避免资源浪费。 【EN】The embodiment of the invention provides a data backup system and method and electronic equipment. The system comprises: the cloud storage system comprises a host machine used for deploying a virtual machine and a cloud storage module used for providing cloud services, wherein a control module is arranged in the host machine, a backup disc of a local disc is created in the cloud storage module, the local disc is a data disc used by the virtual machine on the host machine, and the control module is used for monitoring the writing operation of the virtual machine on the local disc in real time and backing up data in the local disc to the backup disc when the writing operation is monitored. According to the embodiment of the invention, the backup disk of the local disk is created on the cloud storage module, and the control module is arranged in the host machine to monitor the writing operation of the virtual machine on the local disk in real time, so that the real-time backup of the local disk data in the host machine is realized, the safety of the local disk data is improved, and the resource waste can be avoided.

摘要：【中文】本发明涉及一种双极化辐射单元及基站天线，该双极化辐射单元包括辐射体和馈电结构，所述辐射体包括两个极化正交设置的振子主体，每个振子主体包括两个关于所述辐射体的中心对称的振子臂，所述两个振子主体的四个振子臂之间相互连接；所述馈电结构包括两个极化正交设置的馈电体，每个馈电体包括两个关于所述辐射体的中心对称的馈电片，每相邻的两个振子臂之间的连接处的外侧分别设有一个所述馈电片，每个所述馈电片都与所述辐射体呈垂直设置并都沿远离辐射体底面的方向延伸。本发明体积小、重量轻、成本低。 【EN】The invention relates to a dual-polarized radiation unit and a base station antenna, wherein the dual-polarized radiation unit comprises a radiation body and a feed structure, the radiation body comprises two oscillator bodies which are orthogonally arranged in polarization, each oscillator body comprises two oscillator arms which are symmetrical about the center of the radiation body, and the four oscillator arms of the two oscillator bodies are mutually connected; the feed structure comprises two feed bodies which are orthogonally polarized, each feed body comprises two feed pieces which are symmetrical about the center of the radiator, the outer side of the joint between every two adjacent oscillator arms is respectively provided with one feed piece, and each feed piece is perpendicular to the radiator and extends along the direction far away from the bottom surface of the radiator. The invention has small volume, light weight and low cost.

摘要：【中文】本发明公开了一种离子注入机中靶上晶圆冷却及注入温度精确控制的系统，包括：主控系统(1)、信号变送器(2)、红外温度探头(3)、冷却机(4)、水冷管路(5)、回水温度传感器(6)、气冷装置(7)、气冷管路(8)、靶盘(9)、晶圆(10)、气膜(11)。此系统实现全晶圆本身注入温度的精确检测，并准确实时地控制注入温度。 【EN】The invention discloses a system for cooling a wafer on a target in an ion implanter and accurately controlling the implantation temperature, which comprises: the device comprises a main control system (1), a signal transmitter (2), an infrared temperature probe (3), a cooler (4), a water cooling pipeline (5), a backwater temperature sensor (6), an air cooling device (7), an air cooling pipeline (8), a target disc (9), a wafer (10) and an air film (11). The system realizes the accurate detection of the injection temperature of the full wafer and accurately controls the injection temperature in real time.

摘要：【中文】本发明涉及曝光装置以及物品制造方法。提供在使底板或者基板相对于投影光学系统的像面倾斜地对基板进行扫描曝光的曝光装置中对于得到扩大的焦点深度有利的技术。曝光装置具有对原版进行照明的照明光学系统以及将所述原版的图案投影到基板的投影光学系统，所述曝光装置在使所述原版或者所述基板相对于所述投影光学系统的像面倾斜的状态下，一边对所述原版以及所述基板进行扫描，一边对所述基板进行曝光。曝光装置具有：调整部，调整所述原版或者所述基板相对于所述像面的倾斜；以及控制部，控制所述调整部，所述控制部使所述原版或者所述基板向以使形成于所述基板的拍摄区域上的潜像的错误变小的方式决定的方向倾斜。 【EN】The invention relates to an exposure apparatus and an article manufacturing method. Provided is a technique advantageous for obtaining an enlarged focal depth in an exposure device that scans and exposes a substrate by tilting the substrate or the substrate relative to the image plane of a projection optical system. The exposure apparatus includes an illumination optical system that illuminates an original plate and a projection optical system that projects a pattern of the original plate onto a substrate, and exposes the substrate while scanning the original plate and the substrate in a state in which the original plate or the substrate is tilted with respect to an image plane of the projection optical system. The exposure device comprises: an adjusting unit that adjusts the tilt of the original plate or the substrate with respect to the image plane; and a control unit that controls the adjustment unit, wherein the control unit tilts the original plate or the substrate in a direction determined so as to reduce an error of a latent image formed on an imaging area of the substrate.

摘要：【中文】本发明公开了一种高密度阵列式法拉第筒测量探头，包括耐高温导电板、陶瓷绝缘层、散热隔离腔和散热板，陶瓷绝缘层的一侧是高温导电板，另一侧是散热隔离腔，散热板与散热隔离腔连接。其中陶瓷绝缘，层实现了接收探针的高密度分布以及接收探针之间的绝缘，散热隔离腔实现了冷却系统和采集系统的隔离并且使两个系统通过一个法兰口输出。本发明结构紧凑、布局合理、原材料易得、易维护、成本低，不仅解决了束流能量持续采集中材料耐高温问题、材料表层脱落导电微粒问题、探头电气绝缘问题、散热问题还增加了探头面密度，进而提高了法拉第筒的测量精确度，并且不会对真空环境的稳定产生破坏。 【EN】The invention discloses a high-density array type Faraday cylinder measuring probe, which comprises a high-temperature-resistant conductive plate, a ceramic insulating layer, a heat dissipation isolation cavity and a heat dissipation plate, wherein the high-temperature-resistant conductive plate is arranged on one side of the ceramic insulating layer, the heat dissipation isolation cavity is arranged on the other side of the ceramic insulating layer, and the heat dissipation plate is connected with the heat dissipation isolation cavity. The ceramic insulation layer realizes high-density distribution of the receiving probes and insulation among the receiving probes, and the heat dissipation isolation cavity realizes isolation of the cooling system and the acquisition system and enables the two systems to be output through a flange port. The Faraday device has the advantages of compact structure, reasonable layout, easily obtained raw materials, easy maintenance and low cost, solves the problems of high temperature resistance of materials, conductive particles falling off from the surface layer of the materials, electrical insulation of the probe and heat dissipation in continuous beam energy acquisition, increases the surface density of the probe, further improves the measurement accuracy of the Faraday cylinder, and cannot damage the stability of a vacuum environment.

摘要：【中文】本发明公开了一种基于高轨星载SAR系统的电离层层析方法及系统。基于高轨星载SAR系统的电离层层析方法，包括：确定待反演区域内的多个地面PS点；定义从高轨星载SAR至地面PS点的路径为射线，计算各条射线上的TEC值；将待反演区域划分为多个空间网格；计算各条射线在每个空间网格内的截距长度；根据公式迭代计算待反演区域的电子密度分布情况；其中，Ne_j^k+1为第j个空间网格第k+1次迭代后的电子密度值，TECi为第i条射线的TEC值，A_i为第i条射线的长度，A_ij为第i条射线在第j个空间网格内的截距长度，λ_k为松弛因子，取值范围为0～1。采用本发明，可以具备复杂环境下实时精确反演电离层TEC的能力，同时，可实现实时大范围空间内的电子密度精确反演。 【EN】The invention discloses an ionosphere chromatography method and system based on a high-orbit spaceborne SAR system. An ionosphere chromatography method based on a high-orbit spaceborne SAR system comprises the following steps: determining a plurality of ground PS points in an area to be inverted; defining a path from the high-orbit spaceborne SAR to a ground PS point as a ray, and calculating a TEC value on each ray; dividing an area to be inverted into a plurality of spatial grids; calculating the intercept length of each ray in each space grid; according to the formulaIteratively calculating the electron density distribution condition of the region to be inverted; wherein, Ne_j^k+1Is the electron density value of the jth space grid after the k +1 iteration, the TECi is the TEC value of the ith ray, A_iIs the length of the ith ray, A_ijIs the intercept length, λ, of the ith ray in the jth spatial grid_kThe value range of the relaxation factor is 0-1. The invention can realize real-time accurate inversion in complex environmentThe capability of the electric layer TEC is evolved, and meanwhile, the accurate inversion of the electron density in a large-scale space in real time can be realized.

摘要：【中文】本发明公开了一种颗粒捕集器主动再生分级控制方法，它是获取实时颗粒捕集器的碳载量和温度，依据碳载量的多少，确定若干碳载量限定值，依据温度高低确定若干温度限定值，比较颗粒捕集器实时碳载量与碳载量限定值，比较实时颗粒捕集器温度与温度限定值，确定主动再生的方式，所述主动再生的方式是控制发动机推迟点火角、空燃比变稀、提高怠速转速中的一种或一种以上的组合。本发明根据不同碳载量和颗粒捕集器温度所在的区域，及区域的标定，确定主动再生的方式，从而保证在碳载量过高时及时有效清除积碳，降低排气背压。 【EN】The invention discloses a grading control method for active regeneration of a particle trap, which is used for acquiring the carbon loading capacity and the temperature of the real-time particle trap, determining a plurality of carbon loading capacity limit values according to the carbon loading capacity, determining a plurality of temperature limit values according to the temperature, comparing the real-time carbon loading capacity and the carbon loading capacity limit values of the particle trap, comparing the real-time temperature and the temperature limit values of the particle trap and determining an active regeneration mode, wherein the active regeneration mode is one or more of the combination of controlling an engine to delay an ignition angle, changing the air-fuel ratio to be lean and improving the idle speed. The invention determines the active regeneration mode according to the areas where different carbon carrying capacities and particle trap temperatures are located and the calibration of the areas, thereby ensuring that carbon deposition is effectively removed in time when the carbon carrying capacity is too high, and reducing exhaust back pressure.

摘要：【中文】本发明提供一种砌体结构防裂缝的施工方法，步骤如下：布置纵横墙；在纵横墙交接处设置钢筋混凝土柱；再搁置屋面板；局部增设屋面板的伸缩缝；板端支承面做成滑动面；在板底与圈梁之间设滑动层；顶层墙体端部合理布设抗裂柱；设置灰缝钢筋；加设构造柱；在地基的顶部设置地圈梁，进行工程验收。本发明工艺简单，增强了不同构件变形的协调性，减小了屋面板端部膨胀的积累，通过在顶层端部墙体内加设构造柱或敷设钢筋网，并将其与屋面和顶层楼面圈梁相连接成有较大侧移刚度的抗侧移墙，有效控制顶层端部墙体的开裂，减轻了屋面混凝土板的附加内力，有效改善了温度裂缝和地基不均匀沉降裂缝的墙体裂缝质量问题，进而改善了施工质量。 【EN】The invention provides a masonry structure crack prevention construction method, which comprises the following steps: arranging longitudinal and transverse walls; arranging a reinforced concrete column at the joint of the longitudinal wall and the transverse wall; laying the roof board; expansion joints of the roof panel are added locally; the bearing surface of the plate end is made into a sliding surface; a sliding layer is arranged between the plate bottom and the ring beam; anti-cracking columns are reasonably distributed at the end part of the top wall body; setting mortar joint reinforcing steel bars; additionally arranging a constructional column; and arranging a ground ring beam at the top of the foundation for engineering acceptance. The invention has simple process, enhances the deformation coordination of different components, reduces the accumulation of the expansion of the end part of the roof panel, effectively controls the cracking of the end wall body of the top layer, lightens the additional internal force of the concrete slab of the roof, effectively improves the wall body cracking quality problem of temperature cracks and foundation differential settlement cracks and further improves the construction quality by adding constructional columns or laying reinforcing meshes in the end wall body of the top layer and connecting the constructional columns with the roof and the ring beam of the top layer to form the anti-lateral-shift wall with larger lateral shifting rigidity.