摘要：【中文】本发明公开一种抗湿度干扰功能化硅纳米线气敏传感器及其制备方法，包括如下步骤：清洗p型硅片，将p型硅片放置氢氟酸和硝酸银混合水溶液中，p型硅片放置氢氟酸和过氧化氢的混合水溶液中，硝酸水溶液处理，将多孔硅纳米线进行红外氧化，多孔硅纳米线表面进行疏水化处理，制作双顶点电极制备得气敏传感器。本发明利用十八烷基三氯硅烷进行有机功能化处理构筑超疏水结构，改善室温抗湿干扰性能，该方法简单易行、效果好，形成的传感器器件在室温、湿度超过75％的环境中可对ppb级氮氧化物产生稳定的敏感响应。 【EN】The invention discloses a humidity interference resistant functional silicon nanowire gas sensor and a preparation method thereof, wherein the humidity interference resistant functional silicon nanowire gas sensor comprises the following steps: cleaning a p-type silicon wafer, placing the p-type silicon wafer in a mixed aqueous solution of hydrofluoric acid and silver nitrate, placing the p-type silicon wafer in a mixed aqueous solution of hydrofluoric acid and hydrogen peroxide, treating the p-type silicon wafer with a nitric acid aqueous solution, carrying out infrared oxidation on the porous silicon nanowire, carrying out hydrophobic treatment on the surface of the porous silicon nanowire, and manufacturing the double-vertex electrode to prepare the gas sensor. The invention utilizes octadecyl trichlorosilane to carry out organic functional treatment to construct a super-hydrophobic structure, improves the room temperature anti-moisture interference performance, has simple and easy operation and good effect, and can generate stable sensitive response to ppb level nitrogen oxide in the environment with room temperature and humidity over 75 percent.

摘要：【中文】本发明公开一种调节硅纳米线气敏传感器应用湿度窗口的方法，通过制备多孔性硅纳米线并调控多孔结构特征而有效调节硅基纳米线气体传感器应用的最佳湿度窗口的方法，包括如下步骤：(1)清洗p型轻/重掺杂硅片，(2)将硅片置于氢氟酸和硝酸银混合水溶液中，(3)继而将p型轻/重掺杂硅片放置氢氟酸和过氧化氢的混合水溶液中，(4)硝酸水溶液处理，(5)制作双顶电极形成气体传感器。本发明通过步骤(1)、(3)的不同参数选择，实现可以有效调控多孔性硅纳米线的多孔结构的深度和孔径进而满足不同湿度环境的实际应用需求。该方法具有高效性、操作简单、可重复性好、与硅基COMS工艺兼容等优点，可以更好的实现工业化生产。 【EN】The invention discloses a method for adjusting an application humidity window of a silicon nanowire gas sensor, which is a method for effectively adjusting the optimal humidity window of the application of the silicon nanowire gas sensor by preparing porous silicon nanowires and regulating and controlling the characteristics of a porous structure, and comprises the following steps: (1) cleaning a p-type light/heavy doping silicon wafer, (2) placing the silicon wafer in a mixed aqueous solution of hydrofluoric acid and silver nitrate, (3) then placing the p-type light/heavy doping silicon wafer in a mixed aqueous solution of hydrofluoric acid and hydrogen peroxide, (4) treating with a nitric acid aqueous solution, and (5) manufacturing a double-top electrode to form a gas sensor. According to the invention, through different parameter selections in the steps (1) and (3), the depth and the pore diameter of the porous structure of the porous silicon nanowire can be effectively regulated and controlled, so that the actual application requirements of different humidity environments are met. The method has the advantages of high efficiency, simple operation, good repeatability, compatibility with the silicon-based COMS process and the like, and can better realize industrial production.

摘要：【中文】本发明公开一种用于异丙醇室温快速检测的高灵敏纳米硅基气体传感元件及其制备方法，采用双重金属辅助化学刻蚀工艺，对硅纳米线表面进行粗糙化处理并有效降低硅纳米线的阵列密度，实现气敏响应的微结构改性；再经微结构改性的硅纳米线表面均匀包覆超薄醌型聚吡咯薄膜，形成有机‑无机核壳复合结构，实现气敏响应的有机异质改性。本发明形成醌型聚吡咯‑硅纳米线的有机‑无机特殊异质结接触结构，实现对纳米硅敏感元的有效有机异质改性。通过对硅纳米线敏感元的双重改性处理，实现传感器件对异丙醇气体的室温高灵敏响应。 【EN】The invention discloses a high-sensitivity nano silicon-based gas sensing element for quickly detecting isopropanol at room temperature and a preparation method thereof.A double metal-assisted chemical etching process is adopted to roughen the surface of a silicon nanowire and effectively reduce the array density of the silicon nanowire, thereby realizing the microstructure modification of gas-sensitive response; and then the surface of the silicon nanowire modified by the microstructure is uniformly coated with an ultrathin quinoid polypyrrole film to form an organic-inorganic core-shell composite structure, so that organic heterogeneous modification of gas-sensitive response is realized. The invention forms an organic-inorganic special heterojunction contact structure of the quinoid polypyrrole-silicon nanowire and realizes effective organic heterogeneous modification of the nano silicon sensitive element. The high-sensitivity response of the sensing device to the isopropanol gas at room temperature is realized by double modification treatment of the silicon nanowire sensitive element.

摘要：【中文】本发明公开一种具有三维立体多孔特征的聚吡咯‑石墨烯纳米复合气敏结构材料及其制备方法，在持续磁力搅拌的条件下，将还原氧化石墨烯悬浊液滴入吡咯聚合反应液中，滴加浓盐酸调节混合液的pH为2～3，再逐滴滴加过硫酸铵氧化剂溶液，使吡咯单体在石墨烯纳米片表面发生聚合反应形成聚吡咯的均匀壳层。本发明通过在三维石墨烯框架中液相化学聚合吡咯单体形成具有三维多孔结构特征的聚吡咯‑石墨烯纳米复合气敏材料，应用于氨敏传感器对ppb级氨气具有室温高灵敏响应。 【EN】The invention discloses a polypyrrole-graphene nano composite gas sensitive structure material with three-dimensional porous characteristics and a preparation method thereof. The polypyrrole-graphene nano composite gas-sensitive material with the three-dimensional porous structure characteristic is formed by liquid-phase chemical polymerization of pyrrole monomers in a three-dimensional graphene frame, and is applied to an ammonia sensor and has high-sensitivity response to ppb-level ammonia gas at room temperature.