摘要：【中文】本揭露是关于一种极紫外线微影方法。一种用于监控极紫外线光源中的冲击波的方法包括在极紫外线微影工具的极紫外线光源设备中用离子化辐射照射液滴，以产生电浆及侦测由电浆产生的冲击波。基于所侦测到的冲击波来调节极紫外线光源的一或多个操作参数。 【EN】The present disclosure relates to an extreme ultraviolet lithography method. A method for monitoring shock waves in an extreme ultraviolet light source includes irradiating droplets with ionizing radiation in an extreme ultraviolet light source apparatus of an extreme ultraviolet lithography tool to generate a plasma and detecting shock waves generated by the plasma. One or more operating parameters of the extreme ultraviolet light source are adjusted based on the detected shock waves.

摘要：【中文】本发明公开了一种竖井内衬墙施工方法，在坑体内放入环形的模板，使模板的外侧与坑体的内壁之间形成环形的浇筑空间，在浇筑空间中安装环形的钢筋网，然后再向浇筑空间浇筑砼浆，完成第一层浇筑；挖掘下一层土体，在上层浇筑空间的下方安装钢筋网；下压模板，模板的外侧与坑体的内壁之间形成新的浇筑空间，向浇筑空间内浇筑砼浆，然后逐层施工至设计深度。本发明通过在坑体中放入模板，再将钢筋网放入坑体中，向浇筑空间浇筑砼浆后，下压模板，再开挖下一层的土体施工。本发明在浇筑过程中无需重复搭设拆除模板，有效缩短工期，亦能避免模板在移动的过程中偏移，保证了竖井内衬墙的施工质量，使其表面光滑、平整。 【EN】The invention discloses a construction method of a vertical shaft lining wall, which comprises the steps of placing an annular template in a pit body, forming an annular pouring space between the outer side of the template and the inner wall of the pit body, installing an annular reinforcing mesh in the pouring space, and pouring concrete slurry into the pouring space to finish first-layer pouring; excavating a next layer of soil body, and installing a reinforcing mesh below the upper layer pouring space; and (3) pressing the template downwards, forming a new pouring space between the outer side of the template and the inner wall of the pit body, pouring concrete slurry into the pouring space, and then constructing layer by layer to the designed depth. The construction method comprises the steps of placing a template in the pit body, placing the reinforcing mesh in the pit body, pouring concrete slurry into the pouring space, pressing down the template, and excavating the next layer of soil body for construction. The invention does not need to repeatedly set up and dismantle the template in the pouring process, effectively shortens the construction period, can also avoid the displacement of the template in the moving process, ensures the construction quality of the vertical shaft lining wall and ensures the smooth and flat surface of the vertical shaft lining wall.